Tailored electrochemical behavior of ta-C film by glancing angle deposition

doi:10.1016/j.apsusc.2020.146115

	Tailored electrochemical behavior of ta-C film by glancing angle deposition
	Wei, Jing 1,2; Guo, Peng 1; Liu, Linlin 1; Li, Hanchao1,4 ; Li, Hao 1; Wang, Shuyuan 1,2; Ke, Peiling 1,2; Wang, Aiying 1,2,3
	2020-06-30
发表期刊	APPLIED SURFACE SCIENCE (IF:6.3[JCR-2023],5.9[5-Year])
ISSN	0169-4332
卷号	516
发表状态	已发表
DOI	10.1016/j.apsusc.2020.146115
摘要	Tetrahedral amorphous carbon (ta-C) films were obliquely deposited on silicon substrate using a custom-made 45 degree double-bent filtered cathodic vacuum arc (FCVA) system. The effect of glancing angle in a range of 0° to 75° on the growth characteristics, mechanical and electrochemical corrosion behavior of the films were focused. Results showed that increasing the incident angle of carbon ions resulted in a rough surface with agglomerated particles. As the glancing angle changed from 0° to 75°, the residual stress of ta-C film decreased by 28.8%, while the high hardness exceeding 30 GPa were maintained in the films due to the small reduction (13.6%) of sp3 hybridized carbon content. The electrochemical corrosion tests in 3.5 wt% NaCl solution revealed that the superior corrosion resistances were obtained at glancing angle of 45°, which could be discussed in terms of the relatively high sp3 bonded carbon content and the enhanced hydrophobicity properties of the films. © 2020 Elsevier B.V.
收录类别	SCI ; SCIE ; EI
语种	英语
资助项目	National Science and Technology Major Project[2017-VII-0012-0108] ; A-class pilot of the Chinese Academy of Sciences[XDA22010303] ; Ningbo Science and Technology Innovation Project[2018B10014] ; Natural Science Foundation of Ningbo[2018A610175][2018A610171]
WOS研究方向	Chemistry ; Materials Science ; Physics
WOS类目	Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000540029100003
出版者	Elsevier B.V.
EI入藏号	20201308363758
EI主题词	Amorphous carbon ; Amorphous silicon ; Carbon films ; Corrosion resistance ; Corrosive effects ; Deposition ; Microstructure ; Sodium chloride ; Vacuum applications
EI分类号	Metals Corrosion:539.1 ; Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals:549.3 ; Vacuum Applications:633.1 ; Chemical Operations:802.3 ; Coating Materials:813.2 ; Amorphous Solids:933.2 ; Materials Science:951
原始文献类型	Article
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/120832
专题	物质科学与技术学院_博士生
通讯作者	Wang, Aiying
作者单位	1.Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo; 315201, China 2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing; 100049, China 3.Ningbo Institute of Industrial Technology, Chinese Academy of Sciences, Ningbo; 315201, China 4.School of Physical Science and Technology, Shanghai Tech University, Shanghai; 201210, China
推荐引用方式 GB/T 7714	Wei, Jing,Guo, Peng,Liu, Linlin,et al. Tailored electrochemical behavior of ta-C film by glancing angle deposition[J]. APPLIED SURFACE SCIENCE,2020,516.
APA	Wei, Jing.,Guo, Peng.,Liu, Linlin.,Li, Hanchao.,Li, Hao.,...&Wang, Aiying.(2020).Tailored electrochemical behavior of ta-C film by glancing angle deposition.APPLIED SURFACE SCIENCE,516.
MLA	Wei, Jing,et al."Tailored electrochemical behavior of ta-C film by glancing angle deposition".APPLIED SURFACE SCIENCE 516(2020).