MEMS thermal gas flow sensor with self-test function

doi:10.1088/1361-6439/ab4aef

	MEMS thermal gas flow sensor with self-test function
	Ke, Wenjian1,2,3 ; Liu, Meng 1; Li, Tie 1; Wang, Yuelin1
	2019-12
发表期刊	JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IF:2.4[JCR-2023],2.0[5-Year])
ISSN	0960-1317
EISSN	1361-6439
卷号	29 期号:12
发表状态	已发表
DOI	10.1088/1361-6439/ab4aef
摘要	In this paper, the design, fabrication and characterization of a MEMS thermal gas flow sensor with self-test function are presented. The flow sensor is composed of a platinum heater and thermopiles, where the heater is served as a heat source and the thermopiles are used for voltage output. In order to improve the performance of the flow sensor, the heavily doped N/P-polysilicon is utilized to form the thermocouple and XeF2 front-side isotropic etching is adopted to realize thermal isolation of the device. At the same time, the effects of the chip position in the gas channel and heater voltage on device performance are also studied from both experiment and simulation. Moreover, a self-test method and corresponding test system based on the thermal flow sensor are proposed, which use an equivalent heater voltage to simulate the gas flow rate for monitoring the dynamic response of the flow sensor to the gas. This method is simple and effective compared with traditional methods for detecting the performance flow sensors. In addition, the basic output performance of the flow sensor using nitrogen as the test gas is characterized. The experimental results show that the flow sensor owns a relatively high sensitivity of 123.006 mV (m/s)(-1) (no amplification), a low response time of about 250 ms and good accuracy of +/- 1.97%.
关键词	self-test flow sensor chip position heater thermopile
收录类别	EI ; SCIE ; SCI
语种	英语
资助项目	National Key Research and Development Program of China[2018YFA0208500] ; National Key Research and Development Program of China[2017YFA0207103]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:000503192300009
出版者	IOP PUBLISHING LTD
EI入藏号	20195007808864
EI主题词	Etching ; Flow of gases ; Fluorine compounds ; Gases ; Ternary systems ; Thermocouples ; Thermopiles
EI分类号	Gas Dynamics:631.1.2 ; Chemical Reactions:802.2 ; Temperature Measuring Instruments:944.5
WOS关键词	WIND SENSOR ; SENSITIVITY
原始文献类型	Article
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/104882
专题	信息科学与技术学院_博士生信息科学与技术学院_特聘教授组_王跃林组
通讯作者	Wang, Yuelin
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai, Peoples R China 2.Univ ShanghaiTech, Sch Informat Sci & Technol, Shanghai, Peoples R China 3.Univ Chinese Acad Sci, Beijing, Peoples R China
第一作者单位	上海科技大学
推荐引用方式 GB/T 7714	Ke, Wenjian,Liu, Meng,Li, Tie,et al. MEMS thermal gas flow sensor with self-test function[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2019,29(12).
APA	Ke, Wenjian,Liu, Meng,Li, Tie,&Wang, Yuelin.(2019).MEMS thermal gas flow sensor with self-test function.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,29(12).
MLA	Ke, Wenjian,et al."MEMS thermal gas flow sensor with self-test function".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 29.12(2019).