Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics

doi:10.1063/5.0158083

	Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics
	Jiang, Wenbing 1,2; Chen, Junfeng 1,2; Liu, Xiaoyu 1,2; Niu, Zhengqi1,3 ; Liu, Kuang 1,2; Peng, Wei 1,2; Wang, Zhen 1,2; Lin, Zhi-Rong 1,2
	2023-07-10
发表期刊	APPLIED PHYSICS LETTERS
ISSN	0003-6951
卷号	123 期号:2
DOI	10.1063/5.0158083
摘要	Quantum excitations of macroscopic surface acoustic waves (SAWs) have been tailored to control, communicate, and transduce stationary and flying quantum states. However, the limited lifetime of these hybrid quantum systems remains critical obstacles to extend their applications in quantum information processing. Here, we present potentials of thin film aluminum nitride to on-chip integrated phonons with superconducting qubits over previous bulk piezoelectric substrates. We have reported high-quality thin film GHz-SAW resonators with the highest internal quality factor Q i of 4.92 × 10 4 in the quantum regime. The internal losses of SAW resonators are systematically investigated by tuning the parameters of sample layout, power, and temperature. Our results manifest that SAWs on piezoelectric films are readily integrated with standard fabrication of Josephson junction quantum circuits and offer excellent acoustic platforms for high-coherence quantum acoustodynamics architectures. © 2023 Author(s).
关键词	Acoustic resonators Acoustic surface wave devices Acoustic waves Aluminum nitride Nitrides Piezoelectricity Quantum optics Superconducting films Macroscopic surfaces On chips Piezoelectric substrates Quantum information processing Quantum state Quantum system Superconducting qubits Surface acoustic wave resonators Surface acoustic waves Thin-films
URL	查看原文
收录类别	EI
语种	英语
出版者	American Institute of Physics Inc.
EI入藏号	20232914408379
EI主题词	Thin films
EI分类号	701.1 Electricity: Basic Concepts and Phenomena ; 708.3 Superconducting Materials ; 741.1 Light/Optics ; 751.1 Acoustic Waves ; 752.1 Acoustic Devices ; 804.1 Organic Compounds ; 804.2 Inorganic Compounds ; 931.4 Quantum Theory ; Quantum Mechanics
原始文献类型	Journal article (JA)
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/317221
专题	物质科学与技术学院_博士生
通讯作者	Lin, Zhi-Rong
作者单位	1.State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai; 200050, China; 2.University of Chinese Academy of Science, Beijing; 100049, China; 3.ShanghaiTech University, Shanghai; 201210, China
推荐引用方式 GB/T 7714	Jiang, Wenbing,Chen, Junfeng,Liu, Xiaoyu,et al. Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics[J]. APPLIED PHYSICS LETTERS,2023,123(2).
APA	Jiang, Wenbing.,Chen, Junfeng.,Liu, Xiaoyu.,Niu, Zhengqi.,Liu, Kuang.,...&Lin, Zhi-Rong.(2023).Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics.APPLIED PHYSICS LETTERS,123(2).
MLA	Jiang, Wenbing,et al."Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics".APPLIED PHYSICS LETTERS 123.2(2023).