Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications

doi:10.3390/bios13010055

	Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications
	He, Yashuo1 ; Wan, Haotian 2; Jiang, Xiaoning 2; Peng, Chang1
	2023
发表期刊	BIOSENSORS-BASEL
EISSN	2079-6374
卷号	13 期号:1
发表状态	已发表
DOI	10.3390/bios13010055
摘要	The objective of this article is to review the recent advancement in piezoelectric micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric materials, device fabrication and characterization, as well as applications. PMUT has been an active research topic since the late 1990s because of the ultrasound application needs of low cost large 2D arrays, and the promising progresses on piezoelectric thin films, semiconductors, and micro/nano-electromechanical system technology. However, the industrial and medical applications of PMUTs have not been very significant until the recent success of PMUT based fingerprint sensing, which inspired growing interests in PMUT research and development. In this paper, recent advances of piezoelectric materials for PMUTs are reviewed first by analyzing the material properties and their suitability for PMUTs. PMUT structures and the associated micromachining processes are next reviewed with a focus on the complementary metal oxide semiconductor compatibility. PMUT prototypes and their applications over the last decade are then summarized to show the development trend of PMUTs. Finally, the prospective future of PMUTs is discussed as well as the challenges on piezoelectric materials, micro/nanofabrication and device integration.
关键词	PMUT micromachined ultrasound transducer piezoelectric materials medical imaging photoacoustic imaging fingerprint sensing therapy airborne applications
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收录类别	SCI ; SCOPUS ; EI
语种	英语
资助项目	Shanghai Sailing Program[22YF1428900]
WOS研究方向	Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation
WOS类目	Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation
WOS记录号	WOS:000914650400001
出版者	MDPI
EI入藏号	20231213760255
EI主题词	Medical imaging
EI分类号	461.1 Biomedical Engineering ; 604.2 Machining Operations ; 701.1 Electricity: Basic Concepts and Phenomena ; 708.1 Dielectric Materials ; 712.1 Semiconducting Materials ; 714.2 Semiconductor Devices and Integrated Circuits ; 746 Imaging Techniques ; 753.1 Ultrasonic Waves ; 753.2 Ultrasonic Devices ; 901.3 Engineering Research ; 911 Cost and Value Engineering ; Industrial Economics ; 912.1 Industrial Engineering
原始文献类型	Journal article (JA)
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/278857
专题	生物医学工程学院_PI研究组_彭畅组信息科学与技术学院_硕士生
通讯作者	Jiang, Xiaoning; Peng, Chang
作者单位	1.ShanghaiTech Univ, Sch Biomed Engn, Shanghai 201210, Peoples R China 2.North Carolina State Univ, Dept Mech & Aerosp Engn, Raleigh, NC 27695 USA
第一作者单位	生物医学工程学院
通讯作者单位	生物医学工程学院
第一作者的第一单位	生物医学工程学院
推荐引用方式 GB/T 7714	He, Yashuo,Wan, Haotian,Jiang, Xiaoning,et al. Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications[J]. BIOSENSORS-BASEL,2023,13(1).
APA	He, Yashuo,Wan, Haotian,Jiang, Xiaoning,&Peng, Chang.(2023).Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications.BIOSENSORS-BASEL,13(1).
MLA	He, Yashuo,et al."Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications".BIOSENSORS-BASEL 13.1(2023).