Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing

doi:10.18494/SAM.2018.1798

	Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing
	Peng, Xin1,2,3 ; Lv, Yanqing 1,4; Xu, Pengcheng 1; Li, Xinxin1,2 ; Yu, Haitao 1; Xu, Jiaqiang 4
	2018
发表期刊	SENSORS AND MATERIALS
ISSN	0914-4935
卷号	30 期号:4 页码:757-766
发表状态	已发表
DOI	10.18494/SAM.2018.1798
摘要	Gas sensors based on resonant microcantilevers have drawn significant attention in the application of trace molecule detection. In order to realize the practical application of microcantilever-based sensors, three critical points still must be addressed: inexpensive and batch-fabricated microcantilevers, high-performance sensing material and easily operated signal-processing circuit with intelligent software. Herein, a gas sensing system with a multiand- interdisciplinary collaboration mode is proposed. A low-cost and IC-foundry-compatible fabrication technology of the resonant microcantilever is developed. For the example of trace aniline detection, a scalable metal-organic-framework (MOF) material of MOF-5 with ultrahigh surface area and abundant specific aniline-adsorption sites is prepared. For sensing signal processing, an interface circuit with intelligent data processing capability is designed. Composed of the low-cost microcantilever, the advanced MOF-5 sensing material, and the intelligent signal process, the new gas sensing system shows satisfactory performance for trace aniline vapor detection.
关键词	MEMS gas sensor microcantilever MOF-5 PLL
收录类别	SCI ; SCIE ; EI
语种	英语
资助项目	Youth Innovation Promotion Association CAS[2017278] ; Youth Innovation Promotion Association CAS[2016213]
WOS研究方向	Instruments & Instrumentation ; Materials Science
WOS类目	Instruments & Instrumentation ; Materials Science, Multidisciplinary
WOS记录号	WOS:000435403300007
出版者	MYU, SCIENTIFIC PUBLISHING DIVISION
EI入藏号	20181805121384
EI主题词	Aniline ; Application programs ; Chemical detection ; Chemical sensors ; Composite micromechanics ; Crystalline materials ; Data handling ; Foundries ; Gas detectors ; Integrated circuits ; MEMS ; Organometallics ; Phase locked loops ; Timing circuits ; Trace elements
EI分类号	Foundries:534.1 ; Electric Equipment:704.2 ; Pulse Circuits:713.4 ; Electronic Circuits Other Than Amplifiers, Oscillators, Modulators, Limiters, Discriminators or Mixers:713.5 ; Semiconductor Devices and Integrated Circuits:714.2 ; Information Theory and Signal Processing:716.1 ; Computer Software, Data Handling and Applications:723 ; Data Processing and Image Processing:723.2 ; Chemistry:801 ; Organic Compounds:804.1 ; Accidents and Accident Prevention:914.1 ; Mechanics:931.1 ; Crystalline Solids:933.1
WOS关键词	METAL-ORGANIC FRAMEWORKS ; PHASE-LOCKED LOOP ; CRYSTALLINE-SILICON ; SENSORS ; VAPOR ; MOF-5
原始文献类型	Article
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/20912
专题	信息科学与技术学院信息科学与技术学院_特聘教授组_李昕欣组信息科学与技术学院_硕士生
通讯作者	Li, Xinxin; Yu, Haitao; Xu, Jiaqiang
作者单位	1.State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai; 200050, China 2.School of Information Science and Technology, Shanghai Tech University, 393 Middle Huaxia Road, Shanghai; 201210, China 3.University of Chinese Academy of Sciences, No. 19(A) Yuquan Road, Beijing; 100049, China 4.Department of Chemistry, College of Science, Shanghai University, 99 Shangda Road, Shanghai; 200444, China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Peng, Xin,Lv, Yanqing,Xu, Pengcheng,et al. Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing[J]. SENSORS AND MATERIALS,2018,30(4):757-766.
APA	Peng, Xin,Lv, Yanqing,Xu, Pengcheng,Li, Xinxin,Yu, Haitao,&Xu, Jiaqiang.(2018).Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing.SENSORS AND MATERIALS,30(4),757-766.
MLA	Peng, Xin,et al."Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing".SENSORS AND MATERIALS 30.4(2018):757-766.