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ALScN Lamb Wave Resonator Based on NbN Superconducting Electrode at Cryogenic Temperature
会议论文
2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Kaohsiung, Taiwan, 19-23 Jan. 2025
作者:
Wenzhen Li
;
Xuankai Xu
;
Jiawei Li
;
Peng Dong
;
Yiwei Wang
Adobe PDF(2134Kb)
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收藏
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浏览/下载:65/6
|
提交时间:2025/03/25
Ion acoustic waves
Niobium compounds
Shear waves
Superconducting resonators
Ultrasonic waves
Cryogenic temperatures
Electrode material
Lamb resonator
Lamb wave resonators
Niobium nitride
Quality factor Q
Resonator quality
Superconducting at cryogenic temperature
Superconducting electrodes
Superconducting transitions
Well-balanced performance achieved in PZT piezoceramics
via
a multiscale regulation strategy
期刊论文
MATERIALS HORIZONS, 2024, 卷号: 11, 期号: 21, 页码: 5285-5294
作者:
Xiao, Wei
;
Chen, Zhengran
;
Liu, Xiaowei
;
Zhou, Zhiyong
;
Fu, Zhengqian
Adobe PDF(4857Kb)
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浏览/下载:284/2
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提交时间:2024/08/26
Defects
Ferroelectric materials
Ferroelectricity
Piezoelectric ceramics
D 33
Ferroelectric domains
High power
Mechanical quality factor (Q m)
Performance
Piezo-ceramics
Piezoelectric
Piezoelectric coefficient
PZT
Well balanced
Robust Tunability and Newly Emerged Q Resonance of Ba0.8Sr0.2TiO3-Based Microwave Capacitors under Gamma Irradiations
期刊论文
ACS APPLIED MATERIALS AND INTERFACES, 2024, 卷号: 16, 期号: 18, 页码: 23517-23524
作者:
Huo, Changhe
;
Zhang, Xinyuan
;
Li, Cong
;
Xu, Hongtao
;
Yu, Pu
Adobe PDF(6892Kb)
|
收藏
|
浏览/下载:271/0
|
提交时间:2024/05/24
Barium compounds
Domain walls
Electric fields
Ferroelectric thin films
Ferroelectricity
Gamma rays
Irradiation
Strontium compounds
Ba0.8sr0.2TiO3 ferroelectric thin film
Capacitance tunability
Domain wall resonances
Ferroelectric domain-wall resonance
Ferroelectric domains
Ferroelectric thin-films
Gamma irradiation
Lattice expansion
Microwave resonance
Quality factor Q
Quality factor Q microwave resonance
Tunabilities
Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors
期刊论文
CHINESE OPTICS LETTERS, 2022, 卷号: 20, 11, 期号: 11
作者:
Han, Hailong
;
Li, Hao
;
You, Lixing
;
Liu, Xiaoping
Adobe PDF(775Kb)
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收藏
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浏览/下载:548/203
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提交时间:2022/08/26
Fabrication
Optical resonators
Q factor measurement
Scanning electron microscopy
Silicon
Spheres
Surface roughness
Whispering gallery modes
Bosch process
Fabrication and characterizations
Fabrication technique
High Q factor
High quality
High-Q factor
Micro Pillars
On chips
Optical microcavities
Silicon microcavities
Quality Factor Degradation Due to the In-plane Misorientation in POI-SAW Resonators
会议论文
2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS), null,Venice,ITALY, OCT 10-13, 2022
作者:
Wu, Jinbo
;
Zhang, Shibin
;
Zhang, Liping
;
Zheng, Pengcheng
;
Zhou, Hongyan
Adobe PDF(4501Kb)
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收藏
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浏览/下载:336/1
|
提交时间:2023/02/10
SAW devices
Lithium tantalite
Piezo-On-Insulator
quality factor (Q)
deviation angle
In-plane orientation
Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI substrate
会议论文
17TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2022, Virtual, Online, Taiwan, April 14, 2022 - April 17, 2022
作者:
Zhihao Li
;
Yunping Niu
;
Hao Ren
Adobe PDF(1641Kb)
|
收藏
|
浏览/下载:230/0
|
提交时间:2022/07/29
Electromechanical coupling
III-V semiconductors
Mechanics
MEMS
Resonators
Surface waves
Ultrasonic waves
Admittance parameters
Electromechanical coupling coefficients
Element models
Fabricated device
Lamb wave resonators
Modeling simulation
Performance
Quality factor Q
Resonance characteristic
SOI substrates
An Aluminum-Nitride PMUT with Pre-Concaved Membrane for Large Deformation and High Quality-Factor Performance
会议论文
21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, TRANSDUCERS 2021, Virtual, Online, United states, June 20, 2021 - June 25, 2021
作者:
Sheng Wu
;
Wei Li
;
Ding Jiao
;
Heng Yang
;
Tao Wu
Adobe PDF(887Kb)
|
收藏
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浏览/下载:478/1
|
提交时间:2021/12/03
Actuators
Aluminum nitride
III
V semiconductors
Membranes
Microsystems
Nitrogen compounds
Piezoelectricity
Surface micromachining
Ultrasonic applications
Ultrasonic transducers
Device performance
High quality factors
High resonance frequency
Medical ultrasonics
Micro
machined ultrasonic transducer
Molybdenum electrodes
Piezoelectric membranes
Surface micromachining process
PMUT
surface micromachining process
sealed cavity
non-flat membrane structure
high Q factor
large displacement
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