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A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
期刊论文
MICROSYSTEMS & NANOENGINEERING, 2025, 卷号: 11, 期号: 1
作者:
Xiong, Ruihong
;
Xu, Xuankai
;
Liu, Yushuai
;
Du, Shihao
;
Jin, Lihui
Adobe PDF(2020Kb)
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浏览/下载:55/5
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提交时间:2025/03/18
Sensitivity analysis
Springs (components)
Bias instability
Curved beams
Force and displacements
MEMS accelerometer
Noise floor
Noise performance
Parallel configuration
Performance
Softening effect
Spring mechanism
A Novel Near-Zero Stiffness Mems Accelerometer based on Dual Nonlinear Curved Beams Anti-Spring Mechanism
会议论文
2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Kaohsiung, Taiwan, 19-23 Jan. 2025
作者:
Ruihong Xiong
;
Lihui Jin
收藏
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浏览/下载:21/0
|
提交时间:2025/03/25
Curved beams and girders
Earthquakes
Integrated circuit design
Microchannels
Seismic waves
Structural dynamics
Anti-spring
Compression force
Curved beams
Experimental system
High-precision
MEMS accelerometer
Proof mass
Spring mechanism
Stiffness reduction
Zero stiffness
Geometrically Reconfigurable Silk-Based Electronic Implants
会议论文
2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Kaohsiung, Taiwan, 19-23 Jan. 2025
作者:
Siyuan Ni
;
Ziyi Zhu
;
Zhiwen Yan
;
Zhengyu Liang
;
Jianbo Jiang
Adobe PDF(1213Kb)
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收藏
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浏览/下载:33/1
|
提交时间:2025/03/25
Metal implants
Microchannels
Reconfigurable hardware
Bioelectronic implant
Cutting angles
Geometrically reconfigurable
MEMS (microelectromechanical system)
Metallics
Nerve tissue
Peripheral nerves
Reconfigurable
Silk
Spiral electrodes
Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor
期刊论文
IEEE TRANSACTIONS ON MAGNETICS, 2024, 卷号: 60, 期号: 9, 页码: 1-1
作者:
Adobe PDF(982Kb)
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浏览/下载:352/3
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提交时间:2024/08/09
Magnetic domains
Magnetic field measurement
Magnetization
Magnetometers
Microelectromechanical devices
Natural frequencies
Parameter extraction
Piezoelectricity
Resonators
Angle-dependent
Domain
In-plane magnetic fields
Magnetic fields measurements
Magnetic fields sensors
Magnetic-field
Magneto-optic Kerr effect
MEMS resonators
Micromechanical device
Piezoelectric
Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor
会议论文
2024 IEEE INTERNATIONAL MAGNETIC CONFERENCE - SHORT PAPERS (INTERMAG SHORT PAPERS), Rio de Janeiro, Brazil, 5-10 May 2024
作者:
Yuxi Wang
;
Mingye DU
;
Jiawei Li
;
Daozheng Luo
;
Tao Wu
Adobe PDF(442Kb)
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浏览/下载:329/2
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提交时间:2024/07/08
Aluminum nitride
III-V semiconductors
Magnetic domains
Magnetic sensors
Magnetometers
MEMS
Natural frequencies
Resonators
Angle-dependent
Domain
Easy axis
Field detections
In-plane magnetic fields
Magnetic fields sensors
Magnetic-field
MEMS resonant sensors
MEMS resonators
Resonance frequency shift
Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer
期刊论文
NANOSCALE, 2024, 卷号: 16, 期号: 21, 页码: 10230-10238
作者:
Luo, Zhifang
;
Li, Dongxiao
;
Le, Xianhao
;
He, Tianyiyi
;
Shao, Shuai
Adobe PDF(2961Kb)
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浏览/下载:327/4
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提交时间:2024/05/11
Acoustic surface wave devices
Acoustic waves
Aluminum nitride
Electromechanical devices
Graphene
III-V semiconductors
MEMS
MOS devices
Nitrides
Oxide semiconductors
'current
Aluminium-scandium
Complementary metal oxide semiconductor process
Graphene oxides
Low sensitivity
Microelectromechanical-systems technologies
Oxide layer
Performance
Sensing areas
Sensor limits
Electronic Nose Based on the Integration of MEMS Multi-Sensor and CMOS Circuit
会议论文
2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Austin, TX, USA, 21-25 Jan. 2024
作者:
Yue, Xiawei
;
Wang, Jiachuang
;
Zhao, Fangyu
;
Zhang, Pingping
;
Yang, Heng
Adobe PDF(1252Kb)
|
收藏
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浏览/下载:353/0
|
提交时间:2024/03/22
CMOS-MEMS integration
Gas Sensor Array
Electronic-nose
A Wireless Mems Microbial Fuel Cell Biosensor with Record Ultra-Short Response time for Copper Ion in Water Monitoring
会议论文
2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Austin, TX, USA, 21-25 Jan. 2024
作者:
Yining Wang
;
Fengxiang Tang
;
Ruohan Zhang
;
Yifan Wu
;
Hao Ren
Adobe PDF(2025Kb)
|
收藏
|
浏览/下载:312/1
|
提交时间:2024/03/29
Microbial fuel cell (MFC)
Biosensor
Micro-Electro-Mechanical Systems (MEMS)
Response time
Wireless Sensor
Tissue/Organ Adaptable Bioelectronic Silk-Based Implants
期刊论文
ADVANCED MATERIALS, 2024, 卷号: 36, 期号: 38
作者:
Zhu, Ziyi
;
Yan, Zhiwen
;
Ni, Siyuan
Adobe PDF(4912Kb)
|
收藏
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浏览/下载:241/2
|
提交时间:2024/08/09
MEMS
Silk
Tissue
Bioelectronic device
Bioelectronic implant
Functionalized
Living organisms
MEMS (microelectromechanical system)
Nerve modulation
Reconfigurable
Silk material
Supercontraction
Tissue/organ adaptable
A One-port Thermal-conductivity-compensated A0 Mode Al0.8Sc0.2N Lamb Wave Resonator Based on SOI Substrate
会议论文
2023 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), Montreal, QC, Canada, 3-8 Sept. 2023
作者:
Lu, Xianzheng
;
Lou, Liang
;
Ren, Hao
Adobe PDF(1252Kb)
|
收藏
|
浏览/下载:303/1
|
提交时间:2024/01/19
AlxSc1-xN resonators
Lamb wave resonators
Micro-Electro-Mechanical Systems (MEMS)
power handling
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