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Understanding the mechanism of plasma etching of carbon-doped GeSbTe phase change material
期刊论文
APPLIED SURFACE SCIENCE, 2024, 卷号: 671
作者:
Liu, Jin
;
Zhang, Jiarui
;
Wan, Ziqi
;
Chen, Yuqing
;
Zheng, Jia
Adobe PDF(2695Kb)
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浏览/下载:451/4
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提交时间:2024/08/09
Antimony compounds
Bromine compounds
Cleaning
Germanium compounds
Oxygen
Phase change memory
Tellurium compounds
300 mm wafers
Carbon-doped gesbte
Chemical damages
Cleaning process
Etching damages
High temperature process
Phase-change memory
Physical damages
Pitch line
Thermal crosstalk
Single-Crystalline 3D Covalent Organic Frameworks with Exceptionally High Specific Surface Areas and Gas Storage Capacities
期刊论文
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2024, 卷号: 146, 期号: 42, 页码: 28932-28940
作者:
Yu, Baoqiu
;
Tao, Yu
;
Yao, Xuan
;
Jin, Yucheng
;
Liu, Shan
Adobe PDF(5573Kb)
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浏览/下载:280/6
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提交时间:2024/11/04
Catalysis
Crystal atomic structure
Metamorphic rocks
Process heat reactors
Research reactors
Temperature scales
X ray powder diffraction
Covalent organic frameworks
Gas storage capacity
High specific surface area
Isostructures
Single-crystalline
Synchrotron powder X-ray diffractions
Tetrakis
Three-dimensional electrons
X- ray diffractions
X-ray synchrotron
Effect of Prewelding Pretreatment on Welding Residual Stress of Titanium Alloy Thick Plate
期刊论文
JINSHU XUEBAO/ACTA METALLURGICA SINICA, 2024, 卷号: 60, 期号: 8, 页码: 1064-1078
作者:
Zhou, Mu
;
Wang, Qian
;
Wang, Yanxu
;
Zhai, Zirong
;
He, Lunhua
Adobe PDF(5882Kb)
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浏览/下载:340/2
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提交时间:2024/08/23
Compressive stress
Corrosion resistance
Electron beam welding
Electron beams
Heat affected zone
High strength alloys
Microstructure
Neutron diffraction
Neutrons
Seawater corrosion
Stress relief
Titanium alloys
Base metals
Deep hole drilling
Fusion heat
Fusion zones
Heat-affected zones
Preheating temperature
Pretreatment process
Titanium (alloys)
Welding joints
Welding residual stress
The study and optimization of ICP deep etching at a low-temperature for InP solid-immersion metalens fabrication
期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2023, 卷号: 166
作者:
Zhu, Yicheng
;
Wang, Wenjuan
;
Zhou, Min
;
Qu, Huidan
;
Li, Guanhai
Adobe PDF(6984Kb)
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浏览/下载:463/1
|
提交时间:2023/07/28
Aspect ratio
Chlorine compounds
Etching
Fabrication
III-V semiconductors
Inductively coupled plasma
Optimization
Photodetectors
Photons
Semiconducting indium
Semiconducting indium gallium arsenide
Semiconducting indium phosphide
Temperature
Deep etching
Etching process
High aspect ratio structure fabrication
High aspect ratio structures
Inductively coupled plasma deep etching
Inductively-coupled plasma
InP based
Lows-temperatures
MetaLens
Structure fabrication
Dynamic chemical processes on ZnO surfaces tuned by physisorption under ambient conditions
期刊论文
JOURNAL OF ENERGY CHEMISTRY, 2022, 卷号: 72, 页码: 258-264
作者:
Ling, Yunjian
;
Luo, Jie
;
Ran, Yihua
;
Cao, Yunjun
;
Huang, Wugen
Adobe PDF(2046Kb)
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浏览/下载:669/1
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提交时间:2022/07/15
Carbon dioxide
Chemical activation
Chemisorption
High temperature applications
II-VI semiconductors
Molecules
Physisorption
Scanning tunneling microscopy
Surface reactions
X ray photoelectron spectroscopy
Zinc oxide
Ambient conditions
Ambient pressures
Ambient-pressure STM
Catalytic properties
Condition
Density-functional-theory
Dynamic chemical process
Non-reducible
Reducible oxides
ZnO surface
Microstructure of Lithium Dendrites Revealed by Room-Temperature Electron Microscopy
期刊论文
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2022, 卷号: 144, 期号: 9, 页码: 4124-4132
作者:
Zhai, Wenbo
;
Yuan, Biao
;
Fan, Yaqi
;
Zhang, Yue
;
Zhang, Xiuli
Adobe PDF(8723Kb)
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浏览/下载:563/4
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提交时间:2022/04/02
Electrodes
High resolution transmission electron microscopy
Inert gases
Lithium
Lithium batteries
Microstructure
Solid electrolytes
Dissolution process
Electrochemical cycling
Focal points
Gas transfer
Large-scale applications
Li metal
Lithium dendrite
Lows-temperatures
Metal anodes
Temperature characterization
Development and Characterization of High Temperature Plasma Nitridation Process for Advanced CMOS Technology Application
会议论文
PROCEEDINGS OF INTERNATIONAL CONFERENCE ON ASIC, Kunming, China, October 26, 2021 - October 29, 2021
作者:
Xiaoxu Kang
;
Xiaolan Zhong
;
Zhangfa Chen
;
Zhengkai Dao
;
Qiang Zhang
Adobe PDF(2959Kb)
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浏览/下载:387/2
|
提交时间:2022/07/01
CMOS integrated circuits
Silica
Silicon
Advanced CMOS
Bonds concentration
CMOS technology
High-temperature plasmas
Nitridation Process
Plasma Nitridation
Si-N bonds
SiO2 film
Surface nitridation
Thermal SiO2
Dual-color upconversion photoluminescence induced by disordered Yb3+-Ti4+ pairs and defects in highly stable langbeinite-type Rb2Ti0.80Yb1.20(PO4)(3) single crystal
期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2021, 卷号: 856, 页码: #VALUE!
作者:
Li, Ziqing
;
Zhu, Pengfei
;
Ding, Jimin
;
Chen, Yang
;
Wang, Zhenyan
Adobe PDF(4795Kb)
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收藏
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浏览/下载:566/2
|
提交时间:2021/04/01
Disorder
Defect
Upconversion
Cooperative sensitization
Langbeinite
Color
Crystal defects
Crystal structure
Energy transfer
Organic polymers
Photoluminescence
Photons
Rubidium compounds
Single crystals
Titanium compounds
Cooperative luminescence
Disordered crystals
Disordered structures
High temperature solutions
High thermal stability
Photophysical process
Upconversion materials
X ray structural analysis
Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate
期刊论文
MICROMACHINES, 2021, 卷号: 12, 期号: 2, 页码: #VALUE!
作者:
Fei, Sitao
;
Ren, Hao
Adobe PDF(4732Kb)
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收藏
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浏览/下载:992/447
|
提交时间:2021/04/01
MEMS AlN resonator
contour mode
heavily doped silicon
temperature coefficient of frequency (TCF)
cryogenic characteristics
Acoustic wave velocity
Acoustic wave velocity measurement
Aluminum nitride
Electrodes
III
V semiconductors
Natural frequencies
Silicon on insulator technology
Temperature
Thermal conductivity
Aluminum nitride (AlN)
Heavily doped silicons
High thermal conductivity
Microfabrication process
Silicon
on
insulators (SOI)
Temperature characteristic
Temperature coefficient of frequencies
Temperature hysteresis
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