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The design of high-brightness ERL-FEL injector based on VHF electron gun
期刊论文
NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH, SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, 2025, 卷号: 1070
作者:
Chen, Xiuji
;
Liu, Zipeng
;
Chen, Si
;
Huang, Xuan
;
Gu, Duan
Adobe PDF(3656Kb)
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浏览/下载:254/1
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提交时间:2024/11/29
Extreme ultraviolet lithography
Linear accelerators
Photons
Energy recovery linac
Fourth generation
Free-electron lasers
High brightness
Injector
Lattice design
Merger
Optimisations
Superconducting linear accelerators
Very high frequency
Computational Study of Organotin Oxide Systems for Extreme Ultraviolet Photoresist
期刊论文
JOURNAL OF PHYSICAL CHEMISTRY A, 2025, 卷号: 129, 期号: 5, 页码: 1420-1428
作者:
Li, Jingbin
;
Wang, Zhefeng
;
Wang, Han
Adobe PDF(3285Kb)
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浏览/下载:41/4
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提交时间:2025/02/12
Carrier concentration
Europium alloys
Extreme ultraviolet lithography
Ionization potential
Negative ions
Photoresists
Tin alloys
Bonding energies
Computational studies
Extreme ultra-violet lithographies
Extreme Ultraviolet
Organic ligands
Organotin oxide
Oxide systems
Oxo-clusters
Performance
Stringent requirement
Generation of continuous extreme ultraviolet laser
期刊论文
KEXUE TONGBAO/CHINESE SCIENCE BULLETIN, 2024, 卷号: 69, 期号: 28-29, 页码: 4209-4217
作者:
Hong, Daobiao
;
Liu, Zhonghao
;
Qiao, Shan
Adobe PDF(4639Kb)
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浏览/下载:394/69
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提交时间:2024/10/25
Atom lasers
Electron ring accelerators
Extreme ultraviolet lithography
Four wave mixing
Helium neon lasers
Injection lasers
Ionization of gases
Ionization of liquids
Laser beams
Laser excitation
Laser optics
Laser produced plasmas
Molecular vibrations
Optical pumping
Photodissociation
Stimulated Raman scattering
Superfluid helium
Synchrotron radiation
Ultraviolet lasers
Anti-stokes Raman scattering
Continuous lasers
Discharge power
Extreme ultraviolet lasers
Extreme ultraviolet lights
Helium pressure
Near Infrared
Near-infrared
Near-infrared lasers
Single photon process
Experimental study of the dynamics and extreme ultraviolet radiation of laser produced colliding Sn plasmas
期刊论文
PHYSICS OF PLASMAS, 2024, 卷号: 31, 期号: 4
作者:
Wu, Yaoxing
;
Wang, Xinbing
;
Ray, Tyler
;
Thio, Yong Chia Francis
;
Hassanein, Ahmed
Adobe PDF(3204Kb)
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浏览/下载:202/0
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提交时间:2024/05/11
Extreme ultraviolet lithography
Ions
Kinetic energy
Kinetics
Laser beams
Neodymium lasers
Pulsed lasers
Semiconductor device manufacture
Semiconductor lasers
Yttrium aluminum garnet
Colliding plasmas
Extreme ultraviolet light sources
Extreme ultraviolet radiations
Ion kinetic energy
Laser's energy
Optical radiations
Pulse plasmas
Radiation intensity
Single pulse
Time-of flight
Latest developments in EUV photoresist evaluation capability at Shanghai Synchrotron Radiation Facility
期刊论文
NUCLEAR SCIENCE AND TECHNIQUES, 2023, 卷号: 34, 期号: 12
作者:
Li, Zhen-Jiang
;
Qi, Cheng-Hang
;
Li, Bei-Ning
;
Yang, Shu-Min
;
Zhao, Jun
Adobe PDF(2516Kb)
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浏览/下载:225/1
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提交时间:2023/12/22
Aspect ratio
Electron beam lithography
Electron beams
Extreme ultraviolet lithography
Hydrogen
Masks
Synchrotron radiation
Synchrotrons
Beam-lines
Electron-beam lithography
Extreme ultra-violet lithographies
Extreme Ultraviolet
Extreme ultraviolet photoresist
Grating
High resolution
Hydrogen silsesquioxane
Interference lithography
Shanghai synchrotron radiation facilities
Generation of collimated extreme ultraviolet radiation by single-photon process
期刊论文
OPTICS COMMUNICATIONS, 2023, 卷号: 545
作者:
Hong, Daobiao
;
Xiang, Bingke
;
Wu, Tong
;
Liu, Zhonghao
;
Tao, Zhensheng
Adobe PDF(741Kb)
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收藏
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浏览/下载:823/252
|
提交时间:2023/07/07
Atom lasers
Conversion efficiency
Extreme ultraviolet lithography
Laser excitation
Photoelectrons
Photons
Raman scattering
Ultraviolet lasers
'current
Anti-stokes Raman scattering
Bottleneck problem
Collimated extreme ultraviolet radiation
Extreme ultraviolet lasers
Extreme ultraviolet radiations
Laser technologies
Short wavelengths
Single photon process
Table-top
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