中文版 | English

在结果中检索

KMS

浏览/检索结果: 共2条，第1-2条 帮助

已选(0)清除 条数/页：   排序方式：
Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer 期刊论文
MICROMACHINES, 2024, 卷号: 15, 期号: 4
作者:  Wang, Yunhao;  Wu, Sheng;  Wang, Wenjing;  Wu, Tao
Adobe PDF(5053Kb)  |  收藏  |  浏览/下载：418/50  |  提交时间：2024/05/11
An Aluminum-Nitride PMUT with Pre-Concaved Membrane for Large Deformation and High Quality-Factor Performance 会议论文
21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, TRANSDUCERS 2021, Virtual, Online, United states, June 20, 2021 - June 25, 2021
作者:  Sheng Wu;  Wei Li;  Ding Jiao;  Heng Yang;  Tao Wu
Adobe PDF(887Kb)  |  收藏  |  浏览/下载：458/1  |  提交时间：2021/12/03
  • 首页
  • 上一页
  • 1
  • 下一页
  • 末页