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A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
期刊论文
MICROSYSTEMS & NANOENGINEERING, 2025, 卷号: 11, 期号: 1
作者:
Xiong, Ruihong
;
Xu, Xuankai
;
Liu, Yushuai
;
Du, Shihao
;
Jin, Lihui
Adobe PDF(2020Kb)
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浏览/下载:44/4
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提交时间:2025/03/18
Sensitivity analysis
Springs (components)
Bias instability
Curved beams
Force and displacements
MEMS accelerometer
Noise floor
Noise performance
Parallel configuration
Performance
Softening effect
Spring mechanism
High Figure-of-Merit 36Y-cut LiNbO3 Lamb Wave Resonators with Dissipation Loss Optimization
期刊论文
IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, 2025
作者:
Liu YS(刘玉帅)
Adobe PDF(8529Kb)
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浏览/下载:27/1
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提交时间:2025/04/02
Modulation of Temperature Coefficient of Frequency and Spurious-free Response in Shear Horizontal Surface Acoustic Wave Resonators via Energy Distribution
期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2025
作者:
Liu YS(刘玉帅)
Adobe PDF(1409Kb)
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浏览/下载:25/0
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提交时间:2025/04/02
Silicon-integrated scandium-doped aluminum nitride electro-optic modulator
期刊论文
PHOTONICS RESEARCH, 2025, 卷号: 13, 期号: 2, 页码: 477-487
作者:
Xu, Tianqi
;
Liu, Yushuai
;
Pu, Yuanmao
;
Yang, Yongxiang
;
Zhong, Qize
Adobe PDF(1147Kb)
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浏览/下载:379/5
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提交时间:2024/06/24
Aluminum gallium nitride - Amplitude shift keying - CMOS integrated circuits - Digital filters - Electrooptical devices - Fiber optic sensors - Frequency shift keying - Indium phosphide - Light modulation - Light modulators - Notch filters - Phase shift keying - Photonic integrated circuits - Photonic integration technology - Ring lasers - Scandium compounds - Semiconducting aluminum compounds - Semiconducting indium phosphide - Signal modulation - Silicon nitride
Electro-optic modulators - Electro-optics - Fabrication and characterizations - Functional devices - Hexagonal wurtzite structure - Nonlinear properties - Photonic circuits - Piezoelectric property - Seamless integration - Second orders
NBN SUPERCONDUCTING ELECTRODES FOR CRYOGENIC LAMB WAVE RESONATORS ON LITHIUM NIOBATE WITH ENHANCED QUALITY FACTORS
会议论文
THE 23RD INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS
作者:
Liu YS(刘玉帅)
;
Li WZ(李汶臻)
Microsoft Word(1308Kb)
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浏览/下载:22/0
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提交时间:2025/04/02
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2025, 卷号: PP, 期号: 99
作者:
Xuankai Xu
;
Yushuai Liu
Adobe PDF(2956Kb)
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浏览/下载:51/4
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提交时间:2025/02/12
Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO3/SiO2/Si Substrates
期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2025, 卷号: PP, 期号: 99
作者:
Yushuai Liu
;
Yiwei Wang
;
Xuankai Xu
;
Tao Wu
Adobe PDF(3837Kb)
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浏览/下载:35/1
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提交时间:2025/03/25
3.5 Ghz Thermo-Acoustic Phase Modulator Based on Z-Cut LiNbO3 Thin Film
会议论文
2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Kaohsiung, Taiwan, 19-23 Jan. 2025
作者:
Xuankai Xu
;
Yushuai Liu
;
Ruihong Xiong
;
Tao Wu
Adobe PDF(2551Kb)
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浏览/下载:13/1
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提交时间:2025/03/25
Demonstration of acousto-optical modulation based on a thin-film AlScN photonic platform
期刊论文
PHOTONICS RESEARCH, 2024, 卷号: 12, 期号: 6, 页码: 1138-1149
作者:
Bian, Kewei
;
Li, Zhenyu
;
Liu, Yushuai
;
Xu, Sumei
;
Zhao, Xingyan
Adobe PDF(2215Kb)
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浏览/下载:335/3
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提交时间:2024/06/21
Acoustic waves
Aluminum nitride
CMOS integrated circuits
Light modulation
MOS devices
Optical signal processing
Oxide semiconductors
Scandium
Scandium compounds
Thick films
Thin film circuits
Acousto-optic modulations
Acousto-optic modulator
Complementary metal-oxide-semiconductor technologies
Fabrication process
Microwave signal processing
Modulation technologies
On chips
Optical signal-processing
Piezoelectric property
Thin-films
Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film
期刊论文
APPLIED PHYSICS LETTERS, 2024, 卷号: 124, 期号: 19
作者:
Du, Mingye
;
Huang, Feixuan
;
Li, Jiawei
;
Liu, Yushuai
;
Xu, Xuankai
Adobe PDF(2220Kb)
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浏览/下载:411/42
|
提交时间:2024/05/24
Infrared radiation
Lithium
Niobium compounds
Resonators
Surface waves
Thin films
Asymmetric modes
Detection capability
Drift response
Frequency drifts
Infrared detection
Lamb wave mode
Lithium niobate thin films
Maximum frequency
Optimal parameter
Thin-films resonators
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