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RESONANT-GRAVIMETRIC PARTICLE SENSORS WITH AIR-FILTERING CANTILEVER FABRICATED IN LOW-COST NON-SOI SILICON 会议论文
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Belfast, United kingdom, 21-25 Jan. 2018
作者:  Bao, Yuyang;  Cai, Shengran;  Yu, Haitao;  Xu, Tiegang;  Xu, Pengcheng
Adobe PDF(823Kb)  |  收藏  |  浏览/下载:550/1  |  提交时间:2018/06/13
Low cost thin film encapsulation for AlN resonators 会议论文
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Belfast, 21-25 Jan. 2018
作者:  Wu, Tao;  Qian, Zhenyun;  Rinaldi, Matteo
Adobe PDF(1124Kb)  |  收藏  |  浏览/下载:708/12  |  提交时间:2018/06/13
Single-chip multi-frequency wideband filters based on aluminum nitride cross-sectional Lamé mode resonators with thick and apodized electrodes 会议论文
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Belfast, 21-25 Jan. 2018
作者:  Guofeng Chen;  Cristian Cassella;  Tao Wu;  Matteo Rinaldi
Adobe PDF(708Kb)  |  收藏  |  浏览/下载:929/8  |  提交时间:2018/06/13
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