Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering
Liu, Meng1,2; Yang, Yong1,3; Wei, Yuquan1; Li, Yajie1,2; Zhang, Heng1; Liu, Xuejian1,3; Huang, Zhengren1,2
2019-11
Source PublicationCERAMICS INTERNATIONAL
ISSN0272-8842
Volume45Issue:16Pages:19771-19776
Status已发表
DOI10.1016/j.ceramint.2019.06.231
AbstractHigh-purity SiC materials have been used in semiconductor processes due to their excellent properties. However, they are difficult to densify without sintering aids. In this work, dense and high-purity SiC ceramics have been obtained by pressureless solid-state-sintering with ultra-low contents of sintering additives. The amount of residual B, C and O in the high-purity SiC ceramics was less than 0.15 wt%, respectively, and the total content of other impurity elements (such as aluminum, magnesium, calcium, iron, etc.) was less than 0.015 wt%. Finally, the purity of the as-prepared SiC ceramics was more than 99.5 wt%.
KeywordSiC Dense High-purity Pressureless solid-state-sintering
Indexed BySCI
Language英语
Funding ProjectShanghai international science and Technology Cooperation Fund[17520711700] ; Shanghai international science and Technology Cooperation Fund[18520744200]
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Ceramics
WOS IDWOS:000488148100023
PublisherELSEVIER SCI LTD
WOS KeywordOXIDATION BEHAVIOR ; DENSIFICATION ; CARBON
Original Document TypeArticle
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://kms.shanghaitech.edu.cn/handle/2MSLDSTB/67957
Collection物质科学与技术学院_硕士生
物质科学与技术学院_特聘教授组_黄政仁组
Corresponding AuthorYang, Yong; Huang, Zhengren
Affiliation1.Chinese Acad Sci, Shanghai Inst Ceram, 1295 Dingxi Rd, Shanghai 200050, Peoples R China
2.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
3.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
First Author AffilicationSchool of Physical Science and Technology
Corresponding Author AffilicationSchool of Physical Science and Technology
Recommended Citation
GB/T 7714
Liu, Meng,Yang, Yong,Wei, Yuquan,et al. Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering[J]. CERAMICS INTERNATIONAL,2019,45(16):19771-19776.
APA Liu, Meng.,Yang, Yong.,Wei, Yuquan.,Li, Yajie.,Zhang, Heng.,...&Huang, Zhengren.(2019).Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering.CERAMICS INTERNATIONAL,45(16),19771-19776.
MLA Liu, Meng,et al."Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering".CERAMICS INTERNATIONAL 45.16(2019):19771-19776.
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