Effects of NbN Superconducting Electrodes on the Cryogenic Characteristics of Lamb Wave Mode AlScN Piezoelectric MEMS Resonators

	Effects of NbN Superconducting Electrodes on the Cryogenic Characteristics of Lamb Wave Mode AlScN Piezoelectric MEMS Resonators
	Li WZ(李汶臻)
	2025
发表期刊	SENSORS AND ACTUATORS A: PHYSICAL (IF:4.1[JCR-2023],4.0[5-Year])
ISSN	1873-3069
发表状态	已投递待接收
语种	英语
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/507138
专题	信息科学与技术学院_硕士生
作者单位	上海科技大学信息科学与技术学院
推荐引用方式 GB/T 7714	Li WZ. Effects of NbN Superconducting Electrodes on the Cryogenic Characteristics of Lamb Wave Mode AlScN Piezoelectric MEMS Resonators[J]. SENSORS AND ACTUATORS A: PHYSICAL,2025.
APA	Li WZ.(2025).Effects of NbN Superconducting Electrodes on the Cryogenic Characteristics of Lamb Wave Mode AlScN Piezoelectric MEMS Resonators.SENSORS AND ACTUATORS A: PHYSICAL.
MLA	Li WZ."Effects of NbN Superconducting Electrodes on the Cryogenic Characteristics of Lamb Wave Mode AlScN Piezoelectric MEMS Resonators".SENSORS AND ACTUATORS A: PHYSICAL (2025).