High-sensitivity inspection of the ultra-low-density defects in thin films using dark-field spatial correlation spectrum

doi:10.1088/1402-4896/adbf6b

	High-sensitivity inspection of the ultra-low-density defects in thin films using dark-field spatial correlation spectrum
	Li XL(李新龙)1,2
	2025-04-01
发表期刊	PHYSICA SCRIPTA (IF:2.6[JCR-2023],2.3[5-Year])
ISSN	0031-8949
EISSN	1402-4896
卷号	100 期号:4
DOI	10.1088/1402-4896/adbf6b
摘要	A high-sensitivity inspection method for ultra-low-density defects in the thin films is presented by performing spatial correlation calculations on the x-ray dark-field scattering. The sensitivity of defect inspection is theoretically analyzed under varying exposure times and defect thicknesses. The simulation results demonstrate a 25 times increase in inspection sensitivity compared to scanning scattering contrast microscopy (SSCM). An experiment was performed at the Shanghai Synchrotron Radiation Facility and a 56 nm particle defect was successfully inspected with the sensitivity of 8.3. Both theoretical and experimental results indicate that the dark-field spatial correlation spectrum method holds significant potential for advanced defect inspection.
关键词	thin film defect defect inspection correlation spectrum
URL	查看原文
收录类别	SCI
语种	英语
资助项目	Key R&D Program of China[2021YFA1601003]
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
WOS记录号	WOS:001451749600001
出版者	IOP Publishing Ltd
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/503630
专题	物质科学与技术学院_硕士生
作者单位	1.中国科学院上海高等研究院 2.上海科技大学
第一作者单位	上海科技大学
推荐引用方式 GB/T 7714	Li XL. High-sensitivity inspection of the ultra-low-density defects in thin films using dark-field spatial correlation spectrum[J]. PHYSICA SCRIPTA,2025,100(4).
APA	Li XL.(2025).High-sensitivity inspection of the ultra-low-density defects in thin films using dark-field spatial correlation spectrum.PHYSICA SCRIPTA,100(4).
MLA	Li XL."High-sensitivity inspection of the ultra-low-density defects in thin films using dark-field spatial correlation spectrum".PHYSICA SCRIPTA 100.4(2025).