A Novel Near-Zero Stiffness Mems Accelerometer based on Dual Nonlinear Curved Beams Anti-Spring Mechanism

doi:10.1109/MEMS61431.2025.10918107

	A Novel Near-Zero Stiffness Mems Accelerometer based on Dual Nonlinear Curved Beams Anti-Spring Mechanism
	Ruihong Xiong1 ; Lihui Jin1 ; Xuankai Xu1 ; Wenzhen Li1 ; Shihao Du 2,3; Yiwei Wang 1; Fang Chen 2,3; Tao Wu1,2,3,4
	2025
会议录名称	2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
ISSN	1084-6999
发表状态	已发表
DOI	10.1109/MEMS61431.2025.10918107
摘要	This paper presents a novel near-zero stiffness MEMS accelerometer, based on a dual nonlinear curved beams anti-spring mechanism. The mechanism consists of two nonlinear curved beams connected in parallel to the proof mass of the accelerometer. During deflection, these beams are compressed, introducing an axial compression force within each beam, thus achieving a significant stiffness reduction. By utilizing electrostatic force to bias the accelerometer into a low-stiffness position, the proposed design achieves a stiffness reduction of up to 88.29%. Additionally, a high-precision experimental system was built with the accelerometer chip and a low noise interface ASIC. Experimental results demonstrate that the noise floor of the accelerometer is 500 ng/√Hz (at 1-10 Hz), and it has successfully detected seismic wave signal during earthquake exploration.
会议地点	Kaohsiung, Taiwan
会议日期	19-23 Jan. 2025
URL	查看原文
来源库	IEEE
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/503615
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
作者单位	1.School of Information Science and Technology, ShanghaiTech University, China 2.State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China 3.University of Chinese Academy of Sciences, Beijing, China 4.Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, China
第一作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Ruihong Xiong,Lihui Jin,Xuankai Xu,et al. A Novel Near-Zero Stiffness Mems Accelerometer based on Dual Nonlinear Curved Beams Anti-Spring Mechanism[C],2025.