Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO3/SiO2/Si Substrates

doi:10.1109/TED.2025.3541598

	Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO3/SiO2/Si Substrates
	Yushuai Liu1,2,3 ; Yiwei Wang1,2,3 ; Xuankai Xu1,2,3 ; Tao Wu1,2,3,4
	2025
发表期刊	IEEE TRANSACTIONS ON ELECTRON DEVICES (IF:2.9[JCR-2023],2.9[5-Year])
ISSN	1557-9646
EISSN	1557-9646
卷号	PP 期号:99 页码:1961-1968
发表状态	已发表
DOI	10.1109/TED.2025.3541598
摘要	High-performance surface acoustic wave (SAW) filters are essential for meeting modern demands for ubiquitous wireless connectivity and rapid data transmission. This study first explores the design and optimization of shear-horizontal-SAW (SH-SAW) multilayer resonators on 36Y-cut LiNbO3/SiO2/Si substrates, addressing spurious mode suppression, energy dispersion characteristics, and filter applications. To mitigate interference between the transverse and longitudinal modes, a new tilted interdigital transducer (IDT) design and the reflector period ratio λR/${\lambda}<\text{1}$ were implemented. Dispersion analysis identified the optimal wavelength for mode suppression at 1.8 μm, addressing out-of-band (OoB) interference from Rayleigh and high-order SH (SH1) modes. Studies of phase velocity (vp) and energy distribution revealed that metal layers significantly affect acoustic energy dissipation, reducing vp and quality factor (Q) at higher frequencies than 2 GHz. These findings were finally applied to design a spurious-free filter with a center frequency near 2 GHz and a fractional bandwidth (FBW) of 9.9%, demonstrating its potential for high-performance acoustic filters in communication systems.
关键词	Acoustic dispersion Acoustic resonators Acoustic wave transmission Acoustic waves Bandpass filters Electric losses Hydrogels Organoclay Sawing Sols Ultrasonic transducers Energy LiNbO 3 Lithium niobate Shear horizontal Shear horizontal surface acoustic wave Shear horizontals Spurious-free Surface acoustic wave Surface acoustic waves Surface-acoustic-wave filters
URL	查看原文
收录类别	EI
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
EI入藏号	20251318121191
EI主题词	Acoustic surface wave filters
EI分类号	216 Materials Processing ; 482.1 Minerals ; 703.2 Electric Filters ; 704.2 Electric Equipment ; 751.1 Acoustic Waves ; 751.2 Acoustic Properties of Materials ; 752.1 Acoustic Devices ; 753.2 Ultrasonic Devices ; 801.2 Colloid Chemistry ; 804 Chemical Products ; 1009.1 Energy Conservation
原始文献类型	Journal article (JA)
来源库	IEEE
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/503608
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
作者单位	1.School of Information Science and Technology, ShanghaiTech University, Shanghai, China 2.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China 3.School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China 4.Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, Shanghai, China
第一作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Yushuai Liu,Yiwei Wang,Xuankai Xu,et al. Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO3/SiO2/Si Substrates[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES,2025,PP(99):1961-1968.
APA	Yushuai Liu,Yiwei Wang,Xuankai Xu,&Tao Wu.(2025).Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO3/SiO2/Si Substrates.IEEE TRANSACTIONS ON ELECTRON DEVICES,PP(99),1961-1968.
MLA	Yushuai Liu,et al."Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO3/SiO2/Si Substrates".IEEE TRANSACTIONS ON ELECTRON DEVICES PP.99(2025):1961-1968.