Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film

doi:10.1109/JMEMS.2024.3510540

	Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film
	Xuankai Xu1,2,3,4 ; Yushuai Liu1,2,3,4 ; Tao Wu1,2,3,4
	2025
发表期刊	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (IF:2.5[JCR-2023],2.6[5-Year])
ISSN	1941-0158
卷号	PP 期号:99
发表状态	已发表
DOI	10.1109/JMEMS.2024.3510540
摘要	This letter presents a bidirectional thermo-acoustic (TA) modulator utilizing Y36-cut LiNbO3 thin film. The device integrates two TA phase modulators and a one-dimensional (1D) phase-control transducer within a compact footprint of less than 0.35 mm2. The suspended LN thin film TA phase modulator demonstrates a phase response of 17∘/mW. The composed TA amplitude modulator supports bidirectional amplitude modulation, achieving over 30 dB modulation at 460 MHz with a control voltage of 1.1 V. This compact and efficient design makes it ideal for phononic integrated circuit (PnIC) and advanced acoustic signal processing applications. 2024-0162
URL	查看原文
来源库	IEEE
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/483993
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
作者单位	1.School of Information Science and Technology, ShanghaiTech University, Shanghai, China 2.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China 3.School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China 4.Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, Shanghai, China
第一作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Xuankai Xu,Yushuai Liu,Tao Wu. Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2025,PP(99).
APA	Xuankai Xu,Yushuai Liu,&Tao Wu.(2025).Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,PP(99).
MLA	Xuankai Xu,et al."Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS PP.99(2025).