Low Loss Acoustic Waveguide Based On 128° Y-cut Lithium Niobate

doi:10.1109/UFFC-JS60046.2024.10793846

	Low Loss Acoustic Waveguide Based On 128° Y-cut Lithium Niobate
	Wenzhen Li1 ; Jiawei Li1,2,3 ; Tao Wu1,2,3,4
	2024-09
会议录名称	2024 IEEE ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL JOINT SYMPOSIUM (UFFC-JS)
ISSN	1099-4734
发表状态	已发表
DOI	10.1109/UFFC-JS60046.2024.10793846
摘要	In this study, we investigate the simulation and fabrication of overlay-type Surface Acoustic Wave (SAW) waveguides on 128° Y-cut Lithium Niobate (LiNbO3) substrates. A thin metallic layer is deposited on the 128° Y-cut LiNbO3 substrate to serve as the waveguide region. Finite Element Analysis (FEA) is employed to investigate the impact of different metal types and waveguide widths on SAW propagation, with the goal of minimizing propagation loss. Simulation results guide the determination of the optimal waveguide width by analyzing the energy confinement ratio for different modes. Finally, the proposed devices are fabricated using manufacturing processes, and their frequency responses are measured to validate the earlier simulation results. This research offers valuable insights into the design and optimization of SAW waveguides for diverse applications.
会议地点	Taipei, Taiwan
会议日期	22-26 Sept. 2024
URL	查看原文
收录类别	EI
来源库	IEEE
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/464744
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
作者单位	1.School of Information Science and Technology, ShanghaiTech University, China 2.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China 3.University of Chinese Academy of Sciences, Beijing, China 4.Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, China
第一作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Wenzhen Li,Jiawei Li,Tao Wu. Low Loss Acoustic Waveguide Based On 128° Y-cut Lithium Niobate[C],2024.