High-accuracy mirror surface measurement using three scanning interferometric displacement sensors

doi:10.1117/12.3045125

KMS > 大科学中心

	High-accuracy mirror surface measurement using three scanning interferometric displacement sensors
	Wang, Jiezhuo 1,4; Zhou, Guang 1,4; Lei, Weizheng2 ; Dong, Xiaohao 1,3; Wang, Jie 1,3
	2024
会议录名称	PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
ISSN	0277-786X
卷号	13241
发表状态	已发表
DOI	10.1117/12.3045125
摘要	High-accuracy mirror surface measurement using three scanning interferometric displacement sensors, with motion error calibrated, is proposed for X-ray mirror metrology. The motion error of the scanning displacement stage significantly affects the high-accuracy measurement of mirror surfaces during scanning. The influence of motion errors on surface height measurements is studied. After eliminating motion errors with a system comprising three scanning interferometric displacement sensors, the mirror surface can be obtained. The formula for the surface height solution is derived, and the residual error terms are analyzed. A method of error reduction using three reference mirrors to calibrate distance is proposed. The calibration and test experiments are conducted. Experimental results demonstrate the effectiveness of calibration, and the measurement repeatability is 7.39 nm. © 2024 SPIE.
会议录编者/会议主办者	Chinese Optical Society (COS) ; The Society of Photo-Optical Instrumentation Engineers (SPIE)
关键词	Displacement measurement Interferometers Interferometry Mirrors Prisms Strain measurement Velocity measurement Displacement sensor High-accuracy Interferometric displacement sensor Interferometrics Mirror metrology Mirror surfaces Motion errors Optical Metrology Surface height X ray mirrors
会议名称	Optical Metrology and Inspection for Industrial Applications XI 2024
会议地点	Nantong, China
会议日期	October 12, 2024 - October 14, 2024
收录类别	EI
语种	英语
出版者	SPIE
EI入藏号	20245117563374
EI主题词	Surface measurement
EISSN	1996-756X
EI分类号	741.3 Optical Devices and Systems ; 941.2 Acoustic Variables Measurements ; 941.5 ; 942.1.3 ; 942.1.7
原始文献类型	Conference article (CA)
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/461536
专题	大科学中心
通讯作者	Wang, Jiezhuo; Dong, Xiaohao
作者单位	1.Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai; 201800, China; 2.ShanghaiTech University, Shanghai; 201210, China; 3.Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai; 201210, China; 4.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Wang, Jiezhuo,Zhou, Guang,Lei, Weizheng,et al. High-accuracy mirror surface measurement using three scanning interferometric displacement sensors[C]//Chinese Optical Society (COS), The Society of Photo-Optical Instrumentation Engineers (SPIE):SPIE,2024.