Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3

doi:10.1063/5.0233718

	Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3
	Huang, Feixuan 1; Du, Mingye2 ; Ma, Chen 1; He, Xi 1; Suo, Feiya 1; Li, Jiawei 2; Wu, Tao2 ; Wang, Nan 1,3
	2024-11-18
发表期刊	APPLIED PHYSICS LETTERS (IF:3.5[JCR-2023],3.5[5-Year])
ISSN	0003-6951
EISSN	1077-3118
卷号	125 期号:21
发表状态	已发表
DOI	10.1063/5.0233718
摘要	In this paper, a high-frequency lamb wave resonator (LWR) with near zero temperature coefficient of frequency (TCF) is designed, fabricated, and measured. The reported resonator is of a bi-layer structure consisting of lithium niobate (LiNbO3 or LN) and silicon dioxide (SiO2), and lithographically patterned aluminum (Al) inter-digitated electrode fingers on top of the bi-layer structure. By adjusting the thickness ratio of LN and SiO2 layers, both the electromechanical coupling ( k 2 ) and the TCF, including both TCF at resonant frequency (TCFr) and TCF at anti-resonant frequency (TCFa), of the thickness shear (TS) type LWR are optimized. Experimental results, which are in excellent agreement with theoretical analysis, show that the fabricated 11.6-GHz LWR achieves a k 2 of 12.2%, with TCFr and TCFa being −4.2 and −5.4 ppm/K over a temperature range from 30 °C to 85 °C, respectively, demonstrating huge potential in applications for future wireless communication systems above 10 GHz. © 2024 Author(s).
关键词	Aluminum compounds Ion acoustic waves Lithium compounds Organoclay Seismic waves Shock waves Ultrasonic waves Bi-layer structure High frequency HF Lamb wave resonators LiNbO 3 Lithium niobate Near-zero temperature Resonant frequency temperature coefficient SiO 2 Temperature coefficient-of-frequency Zero temperature coefficients
URL	查看原文
收录类别	EI ; SCI
语种	英语
资助项目	Natural Science Foundation of Shanghai[23ZR1442400] ; Jiangsu Provincial Key Research and Development program[BE2023048] ; Foundation of the state key laboratory of Transducer Technology[SKT2303] ; ShanghaiTech University and Soft Matter Nanofab[SMN180827]
WOS研究方向	Physics
WOS类目	Physics, Applied
WOS记录号	WOS:001357983500021
出版者	American Institute of Physics
EI入藏号	20244717409315
EI主题词	Silica
EI分类号	1301.1.2 ; 202.1 ; 202.9.1 ; 482.1 Mineralogical Techniques ; 484 Seismology ; 751.1 Acoustic Waves ; 753.1 Ultrasonic Waves ; 804.2 Inorganic Compounds
原始文献类型	Journal article (JA)
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/449148
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_博士生
通讯作者	Wang, Nan
作者单位	1.School of Microelectronics, Shanghai University, Shanghai; 201899, China 2.School of Information Science and Technology, Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, ShanghaiTech University, Shanghai; 201210, China 3.Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology, Shanghai University, Shanghai; 200444, China
推荐引用方式 GB/T 7714	Huang, Feixuan,Du, Mingye,Ma, Chen,et al. Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3[J]. APPLIED PHYSICS LETTERS,2024,125(21).
APA	Huang, Feixuan.,Du, Mingye.,Ma, Chen.,He, Xi.,Suo, Feiya.,...&Wang, Nan.(2024).Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3.APPLIED PHYSICS LETTERS,125(21).
MLA	Huang, Feixuan,et al."Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3".APPLIED PHYSICS LETTERS 125.21(2024).