Three-dimensional structure of buried heterointerfaces revealed by multislice ptychography

doi:10.1103/PhysRevApplied.22.014016

	Three-dimensional structure of buried heterointerfaces revealed by multislice ptychography
	O'Leary, Colum M.1; Sha, Haozhi 1; Zhang, Jianhua2 ; Su, Cong 3,4,5; Kahn, Salman 3,4,5; Jiang, Huaidong2 ; Zettl, Alex 3,4,5; Ciston, Jim 6; Miao, Jianwei 1
	2024-07
发表期刊	PHYSICAL REVIEW APPLIED (IF:3.8[JCR-2023],4.3[5-Year])
ISSN	2331-7019
EISSN	2331-7019
卷号	22 期号:1
发表状态	已发表
DOI	10.1103/PhysRevApplied.22.014016
摘要	We report on the three-dimensional (3D) structure determination of a twisted hexagonal boron nitride (h-BN) heterointerface from a single-view dataset using multislice ptychography. We identify the buried heterointerface between two twisted h-BN flakes with a lateral resolution of 0.57 Å and a depth resolution of 2.5 nm. The latter represents a significant improvement (∼2.7 times) over the aperture-limited depth resolution of incoherent imaging modes, such as annular-dark-field scanning transmission electron microscopy. This improvement is attributed to the diffraction signal extending beyond the aperture edge, with the depth resolution set by the curvature of the Ewald sphere. Future advancements in this approach could enhance the depth resolution to the subnanometer level and enable the identification of individual dopants, defects, and color centers in twisted heterointerfaces and other materials. © 2024 American Physical Society.
关键词	Boron nitride Color centers Curve fitting High resolution transmission electron microscopy III-V semiconductors Annular dark field scanning transmission electron microscopy Depth resolution Hetero-interfaces Imaging modes Incoherent imaging Lateral resolution Multi slices Structure determination Three dimensional (3D) structures Three-dimensional structure
URL	查看原文
收录类别	EI ; SCI
语种	英语
资助项目	U.S. Department of Energy, Office of Science, Basic Energy Sciences, Division of Materials Sciences and Engineering[DE-SC0010378] ; STROBE: a National Science Foundation Science and Technology Center[DMR-1548924] ; Army Research Office Multidisciplinary University Research Initiative (MURI) program[W911NF-18-1-0431] ; Office of Science, Office of Basic Energy Sciences of the U.S. Department of Energy[DE-AC02-05CH11231] ; Director, Office of Science, Office of Basic Energy Sciences, Materials Sciences and Engineering Division, of the U.S. Department of Energy[DEAC02-05-CH11231]
WOS研究方向	Physics
WOS类目	Physics, Applied
WOS记录号	WOS:001265889100003
出版者	American Physical Society
EI入藏号	20242816695762
EI主题词	Scanning electron microscopy
EI分类号	712.1 Semiconducting Materials ; 741.3 Optical Devices and Systems ; 804.2 Inorganic Compounds ; 921.6 Numerical Methods ; 933.1 Crystalline Solids
原始文献类型	Journal article (JA)
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/407216
专题	物质科学与技术学院大科学中心_PI研究组_江怀东组大科学中心_公共科研平台_大科学装置建设部
作者单位	1.Department of Physics & Astronomy, California NanoSystems Institute, University of California, Los Angeles; CA; 90095, United States; 2.School of Physical Science and Technology, ShanghaiTech University, Shanghai; 201210, China; 3.Department of Physics, University of California at Berkeley, Berkeley; CA; 94720, United States; 4.Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley; CA; 94720, United States; 5.Kavli Energy NanoSciences Institute, University of California, Berkeley; CA; 94720, United States; 6.National Center for Electron Microscopy Facility, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley; CA; 94720, United States
推荐引用方式 GB/T 7714	O'Leary, Colum M.,Sha, Haozhi,Zhang, Jianhua,et al. Three-dimensional structure of buried heterointerfaces revealed by multislice ptychography[J]. PHYSICAL REVIEW APPLIED,2024,22(1).
APA	O'Leary, Colum M..,Sha, Haozhi.,Zhang, Jianhua.,Su, Cong.,Kahn, Salman.,...&Miao, Jianwei.(2024).Three-dimensional structure of buried heterointerfaces revealed by multislice ptychography.PHYSICAL REVIEW APPLIED,22(1).
MLA	O'Leary, Colum M.,et al."Three-dimensional structure of buried heterointerfaces revealed by multislice ptychography".PHYSICAL REVIEW APPLIED 22.1(2024).