High Quality Factor AlScN Lamb Wave Resonators Using NbN/Al Top Electrodes at Cryogenic Temperature

	High Quality Factor AlScN Lamb Wave Resonators Using NbN/Al Top Electrodes at Cryogenic Temperature
	Luo, Zhifang1,2,3,6,7 ; Shao, Shuai1,2,3 ; Dong, Peng4 ; Guo, Haowen1,5 ; Zou, Xinbo1,5 ; Li, Jun4 ; Lee, Chengkuo 6,7; Wu, Tao1,2,3,5
	2023-06
会议录名称	2023 22ND INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, TRANSDUCERS 2023
ISSN	2167-0013
页码	1790-1793
发表状态	已发表
摘要	Coupling between phonons and qubits provides a solid quantum platform for information transmission and processing. We report the high quality factor (Qa) aluminum scandium nitride (AlScN) Lamb wave resonators (LWRs) at cryogenic temperature for quantum applications. Superconducting 60 nm NbN/30nm Al serves as top electrodes for ultra-low energy dissipation at around 11 K. Al0.84Sc0.16N provides a high piezoelectric constant for high electro-mechanical coupling (kt2) of resonators. Additionally, LWRs allow lithography-defined resonant frequency for flexible multi-frequency phonon sources. The fabricated LWR shows Qa over 6000, and resulting in a record figure-of-merit (FoM = kt2∗Qa) of 211 for AlScN resonators. © 2023 IEEJ.
会议录编者/会议主办者	The Institute of Electrical Engineers of Japan (IEEJ)
会议名称	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
会议地点	Kyoto, Japan
会议日期	June 25, 2023 - June 29, 2023
URL	查看原文
收录类别	EI
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
EI入藏号	20242116120396
原始文献类型	Conference article (CA)
来源库	IEEE
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/381456
专题	信息科学与技术学院物质科学与技术学院信息科学与技术学院_PI研究组_邹新波组信息科学与技术学院_PI研究组_吴涛组物质科学与技术学院_博士生信息科学与技术学院_博士生物质科学与技术学院_PI研究组_李军组
通讯作者	Luo, Zhifang; Wu, Tao
作者单位	1.School Of Information Science And Technology, ShanghaiTech University, China; 2.Shanghai Institute Of Microsystem And Information Technology, Chinese Academy Of Sciences, China; 3.University Of Chinese Academy Of Sciences, China; 4.School Of Physical Science And Technology, ShanghaiTech University, China; 5.Shanghai Engineering Research Center Of Energy Efficient And Custom Ai Ic, China; 6.Department Of Electrical & Computer Engineering, National University Of Singapore, Singapore; 7.Center For Intelligent Sensors And Mems, National University Of Singapore, Singapore
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Luo, Zhifang,Shao, Shuai,Dong, Peng,et al. High Quality Factor AlScN Lamb Wave Resonators Using NbN/Al Top Electrodes at Cryogenic Temperature[C]//The Institute of Electrical Engineers of Japan (IEEJ):Institute of Electrical and Electronics Engineers Inc.,2023:1790-1793.