Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems

doi:10.1002/adma.202307782

	Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems
	Hu, Ziying 1; Zhao, Jie 2; Guo, Hexia 1,3; Li, Rui 4; Wu, Mingzheng 1; Shen, Jiahong 3; Wang, Yue 1,5; Qiao, Zheng 3; Xu, Yue 5; Haugstad, Greg 6; An, Dongqi 4; Xie, Zhaoqian 4; Kandela, Irawati 7,8; Nandoliya, Khizar R.9; Chen, Yu10 ; Yu, Yi10 ; Yuan, Qunyao 2; Hou, Junyu 2; Deng, Yujun 11; AlDubayan, Abdulaziz H.3; Yang, Quansan 12; Zeng, Liangsong 12; Lu, Di 1; Koo, Jahyun 1; Bai, Wubin 1; Song, Enming 13; Yao, Shenglian 1; Wolverton, Chris 3; Huang, Yonggang 12; Rogers, John A.1,3,5,12,14
	2024
发表期刊	ADVANCED MATERIALS (IF:27.4[JCR-2023],30.2[5-Year])
ISSN	0935-9648
EISSN	1521-4095
卷号	36 期号:15
发表状态	已发表
DOI	10.1002/adma.202307782
摘要	Bio/ecoresorbable electronic systems create unique opportunities in implantable medical devices that serve a need over a finite time period and then disappear naturally to eliminate the need for extraction surgeries. A critical challenge in the development of this type of technology is in materials that can serve as thin, stable barriers to surrounding ground water or biofluids, yet ultimately dissolve completely to benign end products. This paper describes a class of inorganic material (silicon oxynitride, SiON) that can be formed in thin films by plasma-enhanced chemical vapor deposition for this purpose. In vitro studies suggest that SiON and its dissolution products are biocompatible, indicating the potential for its use in implantable devices. A facile process to fabricate flexible, wafer-scale multilayer films bypasses limitations associated with the mechanical fragility of inorganic thin films. Systematic computational, analytical, and experimental studies highlight the essential materials aspects. Demonstrations in wireless light-emitting diodes both in vitro and in vivo illustrate the practical use of these materials strategies. The ability to select degradation rates and water permeability through fine tuning of chemical compositions and thicknesses provides the opportunity to obtain a range of functional lifetimes to meet different application requirements. © 2024 The Authors. Advanced Materials published by Wiley-VCH GmbH.
关键词	Biocompatibility Degradation Film preparation Groundwater Multilayers Nitrides Plasma CVD Plasma enhanced chemical vapor deposition Silicon compounds Silicon wafers Biofluid barrier Biofluids Bioresorbable Bioresorbable electronic Electronic Packaging Electronics system In-vitro Siliconoxynitride Transient electronics Ultra-thin
收录类别	EI
语种	英语
出版者	John Wiley and Sons Inc
EI入藏号	20240715536057
EI主题词	Multilayer films
EI分类号	444.2 Groundwater ; 461.9.1 Immunology ; 714.2 Semiconductor Devices and Integrated Circuits ; 802.2 Chemical Reactions ; 804.2 Inorganic Compounds ; 813.1 Coating Techniques ; 932.3 Plasma Physics
原始文献类型	Article in Press
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/349767
专题	物质科学与技术学院物质科学与技术学院_PI研究组_于奕组物质科学与技术学院_博士生
通讯作者	Zhao, Jie; Wolverton, Chris; Huang, Yonggang; Rogers, John A.
作者单位	1.Querrey-Simpson Institute for Bioelectronics, Northwestern University, Evanston; IL; 60208, United States 2.State Key Laboratory of Molecular Engineering of Polymers, Department of Materials Science, Fudan University, Shanghai; 200433, China 3.Department of Materials Science and Engineering, Northwestern University, Evanston; IL; 60208, United States 4.State Key Laboratory of Structural Analysis, Optimization and CAE Software for Industrial Equipment, Department of Engineering Mechanics, and International Research Center for Computational Mechanics, Dalian University of Technology, Dalian; 116024, China 5.Department of Biomedical Engineering, Northwestern University, Evanston; IL; 60208, United States 6.Characterization Facility, University of Minnesota, 100 Union St. SE, Minneapolis; MN; 55455, United States 7.Center for Developmental Therapeutics, Northwestern University, Evanston; IL; 60208, United States 8.Chemistry Life Processes Institute, Northwestern University, Evanston; IL; 60208, United States 9.Department of Neurological Surgery, Northwestern University Feinberg School of Medicine, Chicago; IL; 60611, United States 10.School of Physical Science and Technology, Shanghai Tech University, Shanghai; 201210, China 11.State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai; 200240, China 12.Department of Mechanical Engineering, Northwestern University, Evanston; IL; 60208, United States 13.Institute of Optoelectronics, Fudan University, Shanghai; 200433, China 14.Department of Chemistry, Department of Neurological Surgery, and Department of Electrical Engineering and Computer Science, Northwestern University, Evanston; IL; 60208, United States
推荐引用方式 GB/T 7714	Hu, Ziying,Zhao, Jie,Guo, Hexia,et al. Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems[J]. ADVANCED MATERIALS,2024,36(15).
APA	Hu, Ziying.,Zhao, Jie.,Guo, Hexia.,Li, Rui.,Wu, Mingzheng.,...&Rogers, John A..(2024).Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems.ADVANCED MATERIALS,36(15).
MLA	Hu, Ziying,et al."Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems".ADVANCED MATERIALS 36.15(2024).