上海科技大学知识管理系统

In an interconnected high-vacuum illustration system, the surfaces of p-InGaN/GaN heterostructures grown with integrated metalorganic chemical vapor deposition were treated in O2 gas for different times at room temperature and then transferred to another chamber for fabricating ohmic contacts via sputtering Pd/Pt/Au multi-layers. X-ray photoelectron spectroscopy measurements unveil that the proportions of Ga-O of the treated samples significantly increase compared with that of the as-grown sample, indicating that a thin layer of GaOx forms on the p-InGaN/GaN surface after exposing to oxygen or air atmospheres. Meanwhile, the samples exposed to O2 or air were found to have much higher specific contact resistance, i.e., higher by two orders of magnitude than that of the as-grown sample. The specific contact resistance of the as-grown sample was derived as 9.3 × 10−5 Ω cm2 using the circular transmission line measurement. Furthermore, the Schottky barrier height of the samples was determined from the measured I-V curves with the thermionic field emission model and was revealed to be closely related to surface treatments. Despite the fact that the insulating layer of GaOx was as thin as 1.2-1.4 Å for the samples exposed to oxygen at room temperature, it can act as an extra barrier layer causing significant increase in the specific contact resistance via blocking the tunneling of carriers. Therefore, the effective removal of p-InGaN surface oxide plays a vital role in preparing good ohmic contacts. © 2023 Author(s).