Grating Interferometry with High Optical Subdivision

doi:10.1117/12.2500576

	Grating Interferometry with High Optical Subdivision
	Zhu, Shiyao1,2,3 ; Zhou, Changhe1 ; Li, Minkang 1,2; Wei, Chunlong 1; Yu, Junjie 1
	2018
会议录名称	HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VIII
卷号	10818
发表状态	已发表
DOI	10.1117/12.2500576
摘要	In this paper, we propose a high-density grating interferometry system, which can be applied to measure displacement on the nanometer precision. We make use of the optical subdivision module to improve the measurement resolution which is better than the traditional one. The core part of the whole system is a grating with high-density of 1780 lines/mm and long-range of 100mm*100mm. The apparatus adopts a symmetrical structure to reduce the error resulting from environmental disturbance. The system provides a novel measurement technique to improve the grating interferometry. The experimental results show that the grating interferometer system has good stability, and the in-situ measurement error is within +/- 5 nm for a long time. The grating interferometer can measure the short distance displacement of 30 nm and can control the error within +/- 2 nm. The measurement of the distance of 10 mm can control the error within +/- 20 nm. The results proves the feasibility of our proposed improved.
关键词	grating ruler high optical subdivision high density
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
会议地点	Beijing, China
收录类别	EI ; CPCI-S ; CPCI
语种	英语
资助项目	Chinese Academy of Science[QYZDJ-SSW-JSC014]
WOS研究方向	Optics
WOS类目	Optics
WOS记录号	WOS:000455784500045
出版者	SPIE-INT SOC OPTICAL ENGINEERING
EI入藏号	20190106346385
EI主题词	Errors ; Interferometers
EI分类号	Optical Instruments:941.3
原始文献类型	Proceedings Paper
引用统计	正在获取...
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/30172
专题	物质科学与技术学院_硕士生物质科学与技术学院_特聘教授组_周常河组
通讯作者	Zhou, Changhe
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
第一作者单位	物质科学与技术学院
推荐引用方式 GB/T 7714	Zhu, Shiyao,Zhou, Changhe,Li, Minkang,et al. Grating Interferometry with High Optical Subdivision[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2018.