ShanghaiTech University Knowledge Management System
Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing Capabilities | |
2023 | |
会议录名称 | INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC. |
ISSN | 1084-6999 |
卷号 | 2023-January |
页码 | 807-810 |
发表状态 | 已发表 |
DOI | 10.1109/MEMS49605.2023.10052638 |
摘要 | This paper reports a new design of electronic-nose based on the Micro Electromechanical System (MEMS). An array of multiple metal-oxide semiconductor (MOS) gas sensors integrated with temperature and moisture sensing channels are fabricated on a single chip. Benefiting from the heat and humidity sensing capabilities, this electronic-nose exhibits an enhanced gas sensing property with improved accuracy. As low as 0.2 ppm of H2S can be successfully identified, and the resistance of the gas sensor corresponding to the long-term stability drifts only about 3% after 100 days. It opens up new opportunities for fabricating bionic olfactory microsystems with multiple sensing channels and shows its potential for precisely detecting complex gases in practical applications. |
会议录编者/会议主办者 | IEEE MEMS Technical Community |
关键词 | Electronic-nose Gas Sensor Array Long-term Stability Micro Electromechanical System |
会议名称 | 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 |
会议地点 | deu,Munich |
会议日期 | 2023-01-15 |
学科门类 | Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Mechanical Engineering ; Electrical and Electronic Engineering |
URL | 查看原文 |
收录类别 | EI ; SCOPUS |
语种 | 英语 |
出版者 | Institute of Electrical and Electronics Engineers Inc. |
EI入藏号 | 20231113731582 |
EI主题词 | MEMS |
EI分类号 | 443.2 Meteorological Instrumentation ; 704.2 Electric Equipment ; 712.1 Semiconducting Materials ; 714.2 Semiconductor Devices and Integrated Circuits ; 731.3 Specific Variables Control ; 801 Chemistry ; 914.1 Accidents and Accident Prevention ; 942.1 Electric and Electronic Instruments ; 943.3 Special Purpose Instruments ; 944.1 Moisture Measuring Instruments ; 944.2 Moisture Measurements |
原始文献类型 | Conference Paper |
Scopus 记录号 | 2-s2.0-85149862583 |
来源库 | SCOPUS |
引用统计 | 正在获取...
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文献类型 | 会议论文 |
条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/286543 |
专题 | 物质科学与技术学院 |
作者单位 | 1.State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China 2.Suzhou Huiwen Nanotechnology Co. Ltd., Jiangsu, China |
推荐引用方式 GB/T 7714 | Xiawei Yue,Shuai Wei,Pingping Zhang,et al. Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing Capabilities[C]//IEEE MEMS Technical Community:Institute of Electrical and Electronics Engineers Inc.,2023:807-810. |
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