Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing Capabilities
2023
会议录名称INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC.
ISSN1084-6999
卷号2023-January
页码807-810
发表状态已发表
DOI10.1109/MEMS49605.2023.10052638
摘要

This paper reports a new design of electronic-nose based on the Micro Electromechanical System (MEMS). An array of multiple metal-oxide semiconductor (MOS) gas sensors integrated with temperature and moisture sensing channels are fabricated on a single chip. Benefiting from the heat and humidity sensing capabilities, this electronic-nose exhibits an enhanced gas sensing property with improved accuracy. As low as 0.2 ppm of H2S can be successfully identified, and the resistance of the gas sensor corresponding to the long-term stability drifts only about 3% after 100 days. It opens up new opportunities for fabricating bionic olfactory microsystems with multiple sensing channels and shows its potential for precisely detecting complex gases in practical applications.

会议录编者/会议主办者IEEE MEMS Technical Community
关键词Electronic-nose Gas Sensor Array Long-term Stability Micro Electromechanical System
会议名称36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
会议地点deu,Munich
会议日期2023-01-15
学科门类Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Mechanical Engineering ; Electrical and Electronic Engineering
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收录类别EI ; SCOPUS
语种英语
出版者Institute of Electrical and Electronics Engineers Inc.
EI入藏号20231113731582
EI主题词MEMS
EI分类号443.2 Meteorological Instrumentation ; 704.2 Electric Equipment ; 712.1 Semiconducting Materials ; 714.2 Semiconductor Devices and Integrated Circuits ; 731.3 Specific Variables Control ; 801 Chemistry ; 914.1 Accidents and Accident Prevention ; 942.1 Electric and Electronic Instruments ; 943.3 Special Purpose Instruments ; 944.1 Moisture Measuring Instruments ; 944.2 Moisture Measurements
原始文献类型Conference Paper
Scopus 记录号2-s2.0-85149862583
来源库SCOPUS
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文献类型会议论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/286543
专题物质科学与技术学院
作者单位
1.State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
2.Suzhou Huiwen Nanotechnology Co. Ltd., Jiangsu, China
推荐引用方式
GB/T 7714
Xiawei Yue,Shuai Wei,Pingping Zhang,et al. Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing Capabilities[C]//IEEE MEMS Technical Community:Institute of Electrical and Electronics Engineers Inc.,2023:807-810.
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