Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers

doi:10.1109/LSENS.2023.3254593

	Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers
	Junxiang Cai1 ; Yiyun Wang1 ; Daohuai Jiang1 ; Yuandong Gu 2; Liang Lou 2; Fei Gao1 ; Tao Wu1
	2023-03
发表期刊	IEEE SENSORS LETTERS; (IF:2.2[JCR-2023],2.2[5-Year])
ISSN	2475-1472
EISSN	2475-1472
卷号	7 期号:4
发表状态	已发表
DOI	10.1109/LSENS.2023.3254593
摘要	This paper reports broadened bandwidth aluminum nitride (AlN) piezoelectric micromachined ultrasound transducers (BB-PMUT) for photoacoustic imaging (PAI). PMUT based on micro-electromechanical systems (MEMS) technology gains significant attention for PA endoscopic imaging inside colorectal and even blood vessel due to its miniature size, high sensitivity and versatility. Broadened bandwidth, resulting from variable membrane cavity size during the fabrication process, provides benefit to imaging spatial resolution improvement. Moreover, AlN thin film is a non-toxic material, which makes it harmless for biomedical applications with potential of CMOS-MEMS integration. In this work, a BB-PMUT is designed and fabricated. The vibration modes, impedance and bandwidth are analyzed. The BB-PMUT provides a wider fractional bandwidth (65%) for signal detection, which significantly increases the resolution compared with traditional single frequency PMUT design. We have conducted experimental validation on an agar sample to present the sensor's performance in improving axial resolution.
关键词	AlN PMUT Aluminum nitride Bandwidth Broadened bandwidth Endoscopic imaging III-V semiconductor materials Imaging Multi frequency Photoacoustic Resonant frequency Sensors Signal resolution
学科门类	Instrumentation ; Electrical and Electronic Engineering
URL	查看原文
收录类别	EI
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
EI入藏号	20231113737579
EI主题词	Natural frequencies
EI分类号	461.1 Biomedical Engineering ; 461.6 Medicine and Pharmacology ; 701.1 Electricity: Basic Concepts and Phenomena ; 704.2 Electric Equipment ; 712.1 Semiconducting Materials ; 716.1 Information Theory and Signal Processing ; 741.1 Light/Optics ; 746 Imaging Techniques ; 751.1 Acoustic Waves ; 753.2 Ultrasonic Devices ; 753.3 Ultrasonic Applications ; 804.1 Organic Compounds ; 804.2 Inorganic Compounds
原始文献类型	Article
Scopus 记录号	2-s2.0-85149866273
来源库	SCOPUS
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/286526
专题	信息科学与技术学院信息科学与技术学院_PI研究组_高飞组信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
作者单位	1.School of Information Science and Technology, ShanghaiTech University, Shanghai, China 2.Shanghai Industrial μTechnology Research Institute, Shanghai, China
第一作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Junxiang Cai,Yiyun Wang,Daohuai Jiang,et al. Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers[J]. IEEE SENSORS LETTERS;,2023,7(4).
APA	Junxiang Cai.,Yiyun Wang.,Daohuai Jiang.,Yuandong Gu.,Liang Lou.,...&Tao Wu.(2023).Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers.IEEE SENSORS LETTERS;,7(4).
MLA	Junxiang Cai,et al."Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers".IEEE SENSORS LETTERS; 7.4(2023).