Dual-Axis MEMS Micro-Mirror Based On Lithium Niobate Thin-Film

doi:10.1109/IUS54386.2022.9958446

	Dual-Axis MEMS Micro-Mirror Based On Lithium Niobate Thin-Film
	Lu, Yaoqing1,2,3 ; Liu, Kangfu1,2,3 ; Wu, Tao1,2,3,4
	2022-09
会议录名称	2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS)
ISSN	1948-5719
发表状态	已发表
DOI	10.1109/IUS54386.2022.9958446
摘要	This work presents a novel piezoelectric actuated dual-axis micro-mirror using the Lithium Niobate (LiNbO3) thin-film on insulator (LNOI) platform. The performances of the proposed MEMS mirror are analyzed by the COMSOL 3D FEM simulation. Thanks to the strong e(31) and e(33) of LiNbO3 thin film in specific orientations, which contribute to high effective piezoelectric constants e(31,f) , the proposed dual-axis micromirror demonstrate high optical deflection angles in both of scanning modes. The design with LN beta = 123 degrees demonstrates a high deflection of 23.5 degrees for fast scan, which is 14.7x of AlN and 5.3x of Al0 .7Sc0.3N. The simulation results show that the mirror based on LNOI comprehensively surpasses the design with aluminum nitride (AlN) or Sc-doped aluminum nitride (Al1-xScxN). This work demonstrates that LNOI is a promising platform for piezoelectric dual-axis MEMS mirrors.
关键词	Dual-axis micro-mirror lithium niobate LNOI high deflection slow scanning mode fast scanning mode
会议名称	IEEE International Ultrasonics Symposium (IUS)
出版地	345 E 47TH ST, NEW YORK, NY 10017 USA
会议地点	null,Venice,ITALY
会议日期	OCT 10-13, 2022
URL	查看原文
收录类别	CPCI-S
语种	英语
资助项目	National Natural Science Foundation of China[61874073] ; Lingang Laboratory[LG-QS-20220205]
WOS研究方向	Acoustics ; Engineering ; Radiology, Nuclear Medicine & Medical Imaging
WOS类目	Acoustics ; Engineering, Biomedical ; Engineering, Electrical & Electronic ; Radiology, Nuclear Medicine & Medical Imaging
WOS记录号	WOS:000896080400406
出版者	IEEE
来源库	IEEE
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/274940
专题	信息科学与技术学院_硕士生信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_博士生
通讯作者	Lu, Yaoqing
作者单位	1.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Micro Syst & Informat Technol, Shanghai, Peoples R China 3.Univ Chinese Acad Sci, Beijing, Peoples R China 4.Shanghai Engn Res Ctr Energy Efficient & Custom A, Shanghai, Peoples R China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Lu, Yaoqing,Liu, Kangfu,Wu, Tao. Dual-Axis MEMS Micro-Mirror Based On Lithium Niobate Thin-Film[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2022.