Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator

doi:10.35848/1347-4065/aca5d7

	Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator
	Chen, Yang 1,2; Wu, Jinbo1,2,3 ; Zhao, Xiaomeng 1; Li, Zhongxu 1,2; Ke, Xinjian 1,2; Zhang, Shibin 1; Zhou, Min 1; Huang, Kai 1; Ou, Xin 1,2
	2023
发表期刊	JAPANESE JOURNAL OF APPLIED PHYSICS (IF:1.5[JCR-2023],1.3[5-Year])
ISSN	0021-4922
EISSN	1347-4065
卷号	62 期号:1
发表状态	已发表
DOI	10.35848/1347-4065/aca5d7
摘要	Surface acoustic wave (SAW) resonator based on the piezo film on a foreign substrate is promising to enhance the performance of radio frequency filters. In this work, the 4 inch wafer-scale lithium tantalate thin film on quartz (LTOQ) heterogenous substrate was fabricated by ion-cut process. The cut angle of quartz was optimized to achieve high-quality factor (Q) based on finite element analysis. The average film thickness and the film nonuniformity for the whole wafer are 602 nm and +/- 2.2%, respectively. The lithium tantalate film exhibits single-crystalline quality where the full width at half-maximum of high-resolution X-ray diffraction rocking curve is 47.4 arcsec. The shear horizonal surface acoustic wave resonator based on the LTOQ structure exhibits a maximum Bode-Q exceeding 3000 and the electromechanical coupling coefficient of 10.26%. The temperature coefficient of frequency at resonant frequency and anti-resonant frequency are -25.21 ppm degrees C-1 and -35.22 ppm degrees C-1, respectively.
关键词	LTOQ SAW resonator ion-cut piezo thin film heterogenous substrate
URL	查看原文
收录类别	SCI ; EI ; SCOPUS
语种	英语
资助项目	[2020YFB2008801] ; [2021MD0AC01] ; [21DZ1101500]
WOS研究方向	Physics
WOS类目	Physics, Applied
WOS记录号	WOS:000900690700001
出版者	IOP Publishing Ltd
EI入藏号	20230213349530
EI主题词	Quartz
EI分类号	482.2 Minerals ; 542.4 Lithium and Alloys ; 549.1 Alkali Metals ; 631.1 Fluid Flow, General ; 751.1 Acoustic Waves ; 752.1 Acoustic Devices
原始文献类型	Journal article (JA)
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/266599
专题	信息科学与技术学院_博士生
通讯作者	Huang, Kai; Ou, Xin
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China 2.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China 3.ShanghaiTech Univ, Sch Informat Sci & Technol SIST, Shanghai 201210, Peoples R China
推荐引用方式 GB/T 7714	Chen, Yang,Wu, Jinbo,Zhao, Xiaomeng,et al. Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2023,62(1).
APA	Chen, Yang.,Wu, Jinbo.,Zhao, Xiaomeng.,Li, Zhongxu.,Ke, Xinjian.,...&Ou, Xin.(2023).Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator.JAPANESE JOURNAL OF APPLIED PHYSICS,62(1).
MLA	Chen, Yang,et al."Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator".JAPANESE JOURNAL OF APPLIED PHYSICS 62.1(2023).