一种激光热模光刻用抗氧化保护装置

	一种激光热模光刻用抗氧化保护装置
翻译题名	The utility model relates to an anti-oxidation protection device for laser thermal mode lithography
申请号	CN202123213473.4
	2022-07-05
公开（公告）号	CN216901323U
公开日期	2022-07-05
摘要	一种激光热模光刻用抗氧化保护装置，包括惰性气体钢瓶和透明保护罩箱体，透明保护罩箱体侧壁上方设有进口孔，侧壁下方设有出口孔，惰性气体钢瓶通过管路依次经第一节流阀、压力表、第二节流阀和进口孔通入所述透明保护罩箱体内，所述的出口孔外接设有呼吸阀的管路；透明保护罩箱体内侧壁上还设置有干燥室，供干燥剂放置；透明保护罩箱体上设有取样窗口，用于无掩膜激光直写光刻系统中样品的取放，该取样窗口外设有透明门板。本实用新型可以有效减少空气中的水分子和氧气分子与无机相变薄膜材料发生反应，进而减小对后续显影的影响。作为无机相变光刻胶曝光用抗氧化保护装置，大大提高了激光热模光刻曝光和显影工艺的良品率。
翻译摘要	An antioxidizing protector for laser thermal mode lithography comprises an inert gas steel cylinder and a transparent protective cover box body, wherein an inlet hole is formed above the side wall of the transparent protective cover box body, an outlet hole is formed below the side wall of the transparent protective cover box body, the inert gas steel cylinder sequentially passes through a first throttle valve, a pressure gauge, a second throttle valve and the inlet hole through pipelines to be led into the transparent protective cover box body, and the outlet hole is externally connected with a pipeline with a breather valve; The inner side wall of the transparent protective cover box body is also provided with a drying chamber for placing desiccant; A sampling window is arranged on the transparent protective cover box body and used for taking and placing samples in the maskless laser direct writing photoetching system, and a transparent door plate is arranged outside the sampling window. The utility model can effectively reduce the reaction between water molecules and oxygen molecules in the air and the inorganic phase change film material, thereby reducing the influence on the subsequent development. As an antioxidant protection device for exposure of inorganic phase change photoresist, the yield of laser thermal mode lithography exposure and development process is greatly improved.
当前权利人	中国科学院上海光学精密机械研究所 ; 上海科技大学
专利代理人	张宁展
代理机构	上海恒慧知识产权代理事务所(特殊普通合伙) 31317
专利申请人	中国科学院上海光学精密机械研究所; 上海科技大学
	王璐; 魏劲松; 郑金轮; 高天宇; 王阳; 周圣明
公开国别	中国
公开国别简称	CN
IPC 分类号	G03F7//20
专利有效性	有效
专利类型	实用新型
专利类型字典	2
当前法律状态	授权
简单同族	CN216901323U
扩展同族	CN216901323U
INPADOC 同族	CN216901323U
文献类型	专利
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/263258
专题	物质科学与技术学院_特聘教授组_周圣明组
作者单位	上海科技大学
推荐引用方式 GB/T 7714	王璐,魏劲松,郑金轮,等. 一种激光热模光刻用抗氧化保护装置. CN202123213473.4[P]. 2022-07-05.