An optical monitoring method for depositing dielectric layers of arbitrary thickness using reciprocal of transmittance

doi:10.1364/OE.23.004703

	An optical monitoring method for depositing dielectric layers of arbitrary thickness using reciprocal of transmittance
	Cai, Qing-Yuan 1; Zheng, Yu-Xiang 2; Luo, Hai-Han 1; Zhao, Dong-Dong 2; Ma, Xiao-Feng 1; Liu, Ding-Quan1,3
	2015-02-23
发表期刊	OPTICS EXPRESS (IF:3.2[JCR-2023],3.4[5-Year])
ISSN	1094-4087
卷号	23 期号:4 页码:4703-4714
发表状态	已发表
DOI	10.1364/OE.23.004703
摘要	An approach extracting information of both optical monitoring signal and phase thickness of deposited layer on a trace diagram is proposed. Realtime fitting and calculation are performed to get both practical thickness and refractive index of deposited layer with the assist of quartz crystal monitoring for keeping steady rate of deposition. Monitoring error of thickness using this approach is analyzed. It was used to obtain the refractive indices and thickness of Ge layer and SiO layer in in situ measurement mode, and the results were compared with those of ex-situ spectral measurement using infrared spectrometer. The effectiveness of the proposed monitoring method was verified by fabricating narrow bandpass filter consisting of quarter-wave and non-quarter-wave layers. (C) 2015 Optical Society of America
收录类别	SCI ; EI
语种	英语
资助项目	STCSM project of China[13ZR1463700] ; STCSM project of China[12XD1420600]
WOS研究方向	Optics
WOS类目	Optics
WOS记录号	WOS:000350872700084
出版者	OPTICAL SOC AMER
EI入藏号	20151000616364
EI主题词	Bandpass filters ; Germanium ; Monitoring ; Quartz
EI分类号	Minerals:482.2 ; Electric Filters:703.2 ; Light/Optics:741.1 ; Chemical Products Generally:804 ; Acoustical and Optical Measuring Instruments:941 ; Electric and Electronic Measuring Instruments:942 ; Mechanical and Miscellaneous Measuring Instruments:943 ; Moisture, Pressure and Temperature, and Radiation Measuring Instruments:944
WOS关键词	THIN-FILM DEPOSITION ; ERROR COMPENSATION ; COATINGS ; ADMITTANCE ; FILTERS
原始文献类型	Article
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/2258
专题	物质科学与技术学院_特聘教授组_刘定权组
通讯作者	Cai, Qing-Yuan
作者单位	1.Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China 2.Fudan Univ, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China 3.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China
推荐引用方式 GB/T 7714	Cai, Qing-Yuan,Zheng, Yu-Xiang,Luo, Hai-Han,et al. An optical monitoring method for depositing dielectric layers of arbitrary thickness using reciprocal of transmittance[J]. OPTICS EXPRESS,2015,23(4):4703-4714.
APA	Cai, Qing-Yuan,Zheng, Yu-Xiang,Luo, Hai-Han,Zhao, Dong-Dong,Ma, Xiao-Feng,&Liu, Ding-Quan.(2015).An optical monitoring method for depositing dielectric layers of arbitrary thickness using reciprocal of transmittance.OPTICS EXPRESS,23(4),4703-4714.
MLA	Cai, Qing-Yuan,et al."An optical monitoring method for depositing dielectric layers of arbitrary thickness using reciprocal of transmittance".OPTICS EXPRESS 23.4(2015):4703-4714.