Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates

doi:10.1109/TUFFC.2022.3179699

	Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates
	Jinbo Wu1,2,3 ; Shibin Zhang 1; Liping Zhang 1,2; Hongyan Zhou 1,2; Pengcheng Zheng 1,2; Hulin Yao 1,2; Zhongxu Li 1,2; Kai Huang 1; Tao Wu3 ; Xin Ou 1
	2022-08-01
发表期刊	IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL (IF:3.0[JCR-2023],2.9[5-Year])
ISSN	1525-8955
卷号	69 期号:8 页码:1-1
发表状态	已发表
DOI	10.1109/TUFFC.2022.3179699
摘要	This article presents shear horizontal surface acoustic wave (SH-SAW) devices with excellent temperature stability and low loss on ultrathin Y42-cut lithium tantalate film on sapphire substrate (LiTaO3-on-sapphire, LTOS). The demonstrated resonators exhibit scalable resonances from 1.76 to 3.17 GHz, effective electromechanical coupling coefficients between 5.1% and 7.6%, and quality factors (Bode-Q) between 419 and 3019. The filter with a center frequency of 3.26 GHz features a suppressed spurious passband, a 3-dB fractional bandwidth (FBW) of 3%, and a minimum insertion loss (IL) of 2.39 dB. In addition, coplanar waveguides (CPWs) and SH-SAW resonators built on LTOS and LiTaO3-on-insulator (LTOI) substrates were compared over a temperature range of 25 °C–150 °C. Due to the extremely high resistivity of the sapphire and the excellent thermal stability of the LiTaO3/sapphire interface, the IL of the CPW and the impedance ratio (in addition to Bode-Q) of the SH-SAW on the LTOS are maintained well even at 150 °C, while those on the LTOI seriously deteriorate. Of these, the impedance attenuation of LTOS-SAW at the antiresonant frequency is only 3.7 dB at 150 °C, whereas that of LTOI-SAW reaches 9.6 dB, demonstrating excellent temperature stability of the LTOS substrate’s radio frequency (RF) performance. Overall, the SAW devices on LTOS substrates show great potential for temperature-sensitive and low-loss applications in RF wireless communications.
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收录类别	SCI ; SCIE ; EI
来源库	IEEE
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/192397
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_博士生
作者单位	1.State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China 2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China 3.School of Information Science and Technology (SIST), ShanghaiTech University, Shanghai, China
第一作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Jinbo Wu,Shibin Zhang,Liping Zhang,et al. Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates[J]. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL,2022,69(8):1-1.
APA	Jinbo Wu.,Shibin Zhang.,Liping Zhang.,Hongyan Zhou.,Pengcheng Zheng.,...&Xin Ou.(2022).Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates.IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL,69(8),1-1.
MLA	Jinbo Wu,et al."Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates".IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 69.8(2022):1-1.