Assembly and Parallel Implantation of a Penetrating Flexible Probe with Thousands of Microelectrodes
2022
会议录名称IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES
ISSN2160-1968
卷号2022-January
页码400-403
发表状态已发表
DOI10.1109/MEMS51670.2022.9699449
摘要

We report a method of packaging and parallel implantation of a single probe with over two thousand channels, which can be used in the ultaneous real-time multi brain regions neural activity recording. It reached the highest channels of the flexible probe with thickness of only 2 microns that could be parallel implanted into living rodents. The flexible probe was developed with multi-layer wiring technology with up to 133 sites/mm2 high-density recording sites. To match with the existing back-end neural signal acquisition system, polyimide quasi bouquet shape flexible connection cables were designed as the switching unit between the device and the acquisition system, so that the 2640 channels can be switched to ten 256-channel connections. Using two-photon polymerization technology to prepare auxiliary shuttle devices, ultra-high-precision assembly and parallel implantation can be achieved. © 2022 IEEE.

会议录编者/会议主办者IEEE ; IEEE MEMS Technical Community
关键词Brain Mammals MEMS Neurons Probes Signal processing 2 micron Acquisition systems Assembly and parallel implantation Brain regions Flexible probes High-density packaging Multi-layers Penetrating flexible probe Real- time Single probe
会议名称35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
出版地345 E 47TH ST, NEW YORK, NY 10017 USA
会议地点Tokyo, Japan
会议日期January 9, 2022 - January 13, 2022
URL查看原文
收录类别EI ; CPCI-S
语种英语
资助项目National Science and Technology Major Project from Minister of Science and Technology, China[
WOS研究方向Engineering ; Science & Technology - Other Topics
WOS类目Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology
WOS记录号WOS:000784358100102
出版者IEEE Computer Society
EI入藏号20221211806742
EI主题词Microelectrodes
EI分类号461.1 Biomedical Engineering ; 461.9 Biology ; 704.2 Electric Equipment ; 716.1 Information Theory and Signal Processing
原始文献类型Conference article (CA)
文献类型会议论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/167150
专题物质科学与技术学院
物质科学与技术学院_特聘教授组_陶虎组
物质科学与技术学院_硕士生
通讯作者Tao, Tiger H.; Wei, Xiaoling
作者单位
1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China
2.Univ Chinese Acad Sci, Beijing, Peoples R China
3.Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai, Peoples R China
4.Fudan Univ, Huashan Hosp, Dept Neurosurg, Shanghai, Peoples R China
5.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing, Peoples R China
6.Chinese Acad Sci, Ctr Excellence Brain Sci & Intelligence Technol, Shanghai, Peoples R China
7.Shanghai Res Ctr Brain Sci & Brain Inspired Intel, Shanghai, Peoples R China
8.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, X Lab 2020, Shanghai, Peoples R China
通讯作者单位物质科学与技术学院
推荐引用方式
GB/T 7714
Wang, Xueying,Yang, Huiran,Zhu, Ziyi,et al. Assembly and Parallel Implantation of a Penetrating Flexible Probe with Thousands of Microelectrodes[C]//IEEE, IEEE MEMS Technical Community. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE Computer Society,2022:400-403.
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