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Assembly and Parallel Implantation of a Penetrating Flexible Probe with Thousands of Microelectrodes | |
2022 | |
会议录名称 | IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES |
ISSN | 2160-1968 |
卷号 | 2022-January |
页码 | 400-403 |
发表状态 | 已发表 |
DOI | 10.1109/MEMS51670.2022.9699449 |
摘要 | We report a method of packaging and parallel implantation of a single probe with over two thousand channels, which can be used in the ultaneous real-time multi brain regions neural activity recording. It reached the highest channels of the flexible probe with thickness of only 2 microns that could be parallel implanted into living rodents. The flexible probe was developed with multi-layer wiring technology with up to 133 sites/mm2 high-density recording sites. To match with the existing back-end neural signal acquisition system, polyimide quasi bouquet shape flexible connection cables were designed as the switching unit between the device and the acquisition system, so that the 2640 channels can be switched to ten 256-channel connections. Using two-photon polymerization technology to prepare auxiliary shuttle devices, ultra-high-precision assembly and parallel implantation can be achieved. © 2022 IEEE. |
会议录编者/会议主办者 | IEEE ; IEEE MEMS Technical Community |
关键词 | Brain Mammals MEMS Neurons Probes Signal processing 2 micron Acquisition systems Assembly and parallel implantation Brain regions Flexible probes High-density packaging Multi-layers Penetrating flexible probe Real- time Single probe |
会议名称 | 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 |
出版地 | 345 E 47TH ST, NEW YORK, NY 10017 USA |
会议地点 | Tokyo, Japan |
会议日期 | January 9, 2022 - January 13, 2022 |
URL | 查看原文 |
收录类别 | EI ; CPCI-S |
语种 | 英语 |
资助项目 | National Science and Technology Major Project from Minister of Science and Technology, China[ |
WOS研究方向 | Engineering ; Science & Technology - Other Topics |
WOS类目 | Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology |
WOS记录号 | WOS:000784358100102 |
出版者 | IEEE Computer Society |
EI入藏号 | 20221211806742 |
EI主题词 | Microelectrodes |
EI分类号 | 461.1 Biomedical Engineering ; 461.9 Biology ; 704.2 Electric Equipment ; 716.1 Information Theory and Signal Processing |
原始文献类型 | Conference article (CA) |
文献类型 | 会议论文 |
条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/167150 |
专题 | 物质科学与技术学院 物质科学与技术学院_特聘教授组_陶虎组 物质科学与技术学院_硕士生 |
通讯作者 | Tao, Tiger H.; Wei, Xiaoling |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China 2.Univ Chinese Acad Sci, Beijing, Peoples R China 3.Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai, Peoples R China 4.Fudan Univ, Huashan Hosp, Dept Neurosurg, Shanghai, Peoples R China 5.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing, Peoples R China 6.Chinese Acad Sci, Ctr Excellence Brain Sci & Intelligence Technol, Shanghai, Peoples R China 7.Shanghai Res Ctr Brain Sci & Brain Inspired Intel, Shanghai, Peoples R China 8.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, X Lab 2020, Shanghai, Peoples R China |
通讯作者单位 | 物质科学与技术学院 |
推荐引用方式 GB/T 7714 | Wang, Xueying,Yang, Huiran,Zhu, Ziyi,et al. Assembly and Parallel Implantation of a Penetrating Flexible Probe with Thousands of Microelectrodes[C]//IEEE, IEEE MEMS Technical Community. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE Computer Society,2022:400-403. |
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