ShanghaiTech University Knowledge Management System
High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions | |
Tan, Yuanxin1,2; Wang, Zhaohui3; Chu, Wei1; Liao, Yang1; Qiao, Lingling1; Cheng, Ya1,4 | |
2016-12 | |
发表期刊 | OPTICAL MATERIALS EXPRESS |
ISSN | 2159-3930 |
卷号 | 6期号:12页码:3787-3793 |
发表状态 | 已发表 |
DOI | 10.1364/OME.6.003787 |
摘要 | We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of similar to 100 mu m. (C) 2016 Optical Society of America |
收录类别 | SCI ; EI |
语种 | 英语 |
资助项目 | National Natural Science Foundation of China[61327902] ; National Natural Science Foundation of China[11104294] ; National Natural Science Foundation of China[61275205] ; National Natural Science Foundation of China[61405220] ; National Natural Science Foundation of China[61221064] ; National Natural Science Foundation of China[11304330] |
WOS研究方向 | Materials Science ; Optics |
WOS类目 | Materials Science, Multidisciplinary ; Optics |
WOS记录号 | WOS:000390408500011 |
出版者 | OPTICAL SOC AMER |
EI入藏号 | 20165203194931 |
EI主题词 | Glass |
EI分类号 | Glass:812.3 |
WOS关键词 | FEMTOSECOND LASER-PULSES ; PHOTOSENSITIVE GLASS |
原始文献类型 | Article |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/1615 |
专题 | 物质科学与技术学院 物质科学与技术学院_特聘教授组_程亚组 物质科学与技术学院_硕士生 |
通讯作者 | Cheng, Ya |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China 3.AVIC, Luoyang Inst Electroopt Equipment, Luoyang 471000, Peoples R China 4.East Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China |
第一作者单位 | 物质科学与技术学院 |
推荐引用方式 GB/T 7714 | Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,et al. High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions[J]. OPTICAL MATERIALS EXPRESS,2016,6(12):3787-3793. |
APA | Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,Liao, Yang,Qiao, Lingling,&Cheng, Ya.(2016).High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions.OPTICAL MATERIALS EXPRESS,6(12),3787-3793. |
MLA | Tan, Yuanxin,et al."High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions".OPTICAL MATERIALS EXPRESS 6.12(2016):3787-3793. |
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