High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions
Tan, Yuanxin1,2; Wang, Zhaohui3; Chu, Wei1; Liao, Yang1; Qiao, Lingling1; Cheng, Ya1,4
2016-12
发表期刊OPTICAL MATERIALS EXPRESS
ISSN2159-3930
卷号6期号:12页码:3787-3793
发表状态已发表
DOI10.1364/OME.6.003787
摘要We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of similar to 100 mu m. (C) 2016 Optical Society of America
收录类别SCI ; EI
语种英语
资助项目National Natural Science Foundation of China[61327902] ; National Natural Science Foundation of China[11104294] ; National Natural Science Foundation of China[61275205] ; National Natural Science Foundation of China[61405220] ; National Natural Science Foundation of China[61221064] ; National Natural Science Foundation of China[11304330]
WOS研究方向Materials Science ; Optics
WOS类目Materials Science, Multidisciplinary ; Optics
WOS记录号WOS:000390408500011
出版者OPTICAL SOC AMER
EI入藏号20165203194931
EI主题词Glass
EI分类号Glass:812.3
WOS关键词FEMTOSECOND LASER-PULSES ; PHOTOSENSITIVE GLASS
原始文献类型Article
引用统计
文献类型期刊论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/1615
专题物质科学与技术学院
物质科学与技术学院_特聘教授组_程亚组
物质科学与技术学院_硕士生
通讯作者Cheng, Ya
作者单位1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
2.Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China
3.AVIC, Luoyang Inst Electroopt Equipment, Luoyang 471000, Peoples R China
4.East Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China
第一作者单位物质科学与技术学院
推荐引用方式
GB/T 7714
Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,et al. High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions[J]. OPTICAL MATERIALS EXPRESS,2016,6(12):3787-3793.
APA Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,Liao, Yang,Qiao, Lingling,&Cheng, Ya.(2016).High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions.OPTICAL MATERIALS EXPRESS,6(12),3787-3793.
MLA Tan, Yuanxin,et al."High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions".OPTICAL MATERIALS EXPRESS 6.12(2016):3787-3793.
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