High-performance transparent conductive film by using ultra-thin metal grids

doi:10.1088/1361-6641/ac4d15

	High-performance transparent conductive film by using ultra-thin metal grids
	Yin, Zhiqin 1,2,3,4; Liu, Qingquan1,2,3,4,5 ; Cui, Zhuangzhuang 1,2,3,4; Xuan, Zhiyi1,2,3,4,5 ; Xie, Maobing 1,2,3,4; Yao, Bimu 1,3,4; Wang, Shaowei 1,2,3,4
	2022-03
发表期刊	SEMICONDUCTOR SCIENCE AND TECHNOLOGY (IF:1.9[JCR-2023],1.9[5-Year])
ISSN	0268-1242
EISSN	1361-6641
卷号	37 期号:3
发表状态	已发表
DOI	10.1088/1361-6641/ac4d15
摘要	Transparent conductive films (TCFs) are indispensable for many optoelectronic devices. Films with high transmittance and low sheet resistance at low cost are ideal for people to pursue. In this paper, ultra-thin Au grid TCFs with thickness less than 0.32 mu m are developed and fabricated by ultraviolet lithography. Nanoscale thick metal grid and simple experimental steps can greatly reduce their cost. The influence of grid shape (square, hexagon, ring), thickness and duty ratio on the transmittance and sheet resistance has been investigated systematically. The TCF with square shape Au grid has excellent properties with transmittance of 96.9%, sheet resistance of 11.5 omega sq(-1), and corresponding figure of merit of 1016. It is a good transparent heater with heating speed 100% faster and heating temperature 3.3% higher than indium tin oxide. It can also be fabricated on flexible substrates and exhibit good mechanical property, which have wide practical applications.
关键词	transparent conductive film ultra-thin metal grids ultraviolet lithography
URL	查看原文
收录类别	SCI ; SCIE ; EI
语种	英语
资助项目	National Natural Science Foundation of China (NSFC)[11874376] ; Shanghai Science and Technology Foundations[
WOS研究方向	Engineering ; Materials Science ; Physics
WOS类目	Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Condensed Matter
WOS记录号	WOS:000749537800001
出版者	IOP Publishing Ltd
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/154100
专题	物质科学与技术学院_博士生
通讯作者	Wang, Shaowei
作者单位	1.Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, Shanghai 200083, Peoples R China 2.Shanghai Res Ctr Quantum Sci, Shanghai 201315, Peoples R China 3.Shanghai Engn Res Ctr Energy Saving Coatings, Shanghai 200083, Peoples R China 4.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 5.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
推荐引用方式 GB/T 7714	Yin, Zhiqin,Liu, Qingquan,Cui, Zhuangzhuang,et al. High-performance transparent conductive film by using ultra-thin metal grids[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY,2022,37(3).
APA	Yin, Zhiqin.,Liu, Qingquan.,Cui, Zhuangzhuang.,Xuan, Zhiyi.,Xie, Maobing.,...&Wang, Shaowei.(2022).High-performance transparent conductive film by using ultra-thin metal grids.SEMICONDUCTOR SCIENCE AND TECHNOLOGY,37(3).
MLA	Yin, Zhiqin,et al."High-performance transparent conductive film by using ultra-thin metal grids".SEMICONDUCTOR SCIENCE AND TECHNOLOGY 37.3(2022).