Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
Fang, Zhiwei1,2,3; Xu, Yingxin4; Wang, Min1,2; Qiao, Lingling1; Lin, Jintian1; Fang, Wei4; Cheng, Ya1,5,6
2017-03-30
Source PublicationSCIENTIFIC REPORTS
ISSN2045-2322
Volume7
DOI10.1038/srep45610
AbstractWe demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 x 10(5).
Indexed BySCI
Language英语
Funding ProjectFundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics[IOSKL2015KF34]
WOS Research AreaScience & Technology - Other Topics
WOS SubjectMultidisciplinary Sciences
WOS IDWOS:000398952300001
PublisherNATURE PUBLISHING GROUP
WOS KeywordHIGH-QUALITY-FACTOR ; MICRODISK RESONATORS ; MICRORING RESONATORS ; FABRICATION ; CHIP ; CRYSTAL
Original Document TypeArticle
Citation statistics
Cited Times:8[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://kms.shanghaitech.edu.cn/handle/2MSLDSTB/1453
Collection物质科学与技术学院
物质科学与技术学院_特聘教授组_程亚组
物质科学与技术学院_博士生
Corresponding AuthorLin, Jintian; Fang, Wei; Cheng, Ya
Affiliation1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
4.Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
5.East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China
6.Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 03006, Shanxi, Peoples R China
First Author AffilicationSchool of Physical Science and Technology
Recommended Citation
GB/T 7714
Fang, Zhiwei,Xu, Yingxin,Wang, Min,et al. Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing[J]. SCIENTIFIC REPORTS,2017,7.
APA Fang, Zhiwei.,Xu, Yingxin.,Wang, Min.,Qiao, Lingling.,Lin, Jintian.,...&Cheng, Ya.(2017).Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing.SCIENTIFIC REPORTS,7.
MLA Fang, Zhiwei,et al."Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing".SCIENTIFIC REPORTS 7(2017).
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