Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing

doi:10.1038/srep45610

	Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
	Fang, Zhiwei1,2,3 ; Xu, Yingxin 4; Wang, Min 1,2; Qiao, Lingling 1; Lin, Jintian 1; Fang, Wei 4; Cheng, Ya1,5,6
	2017-03-30
发表期刊	SCIENTIFIC REPORTS
ISSN	2045-2322
卷号	7
发表状态	已发表
DOI	10.1038/srep45610
摘要	We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 x 10(5).
收录类别	SCI
语种	英语
资助项目	Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics[IOSKL2015KF34]
WOS研究方向	Science & Technology - Other Topics
WOS类目	Multidisciplinary Sciences
WOS记录号	WOS:000398952300001
出版者	NATURE PUBLISHING GROUP
WOS关键词	HIGH-QUALITY-FACTOR ; MICRODISK RESONATORS ; MICRORING RESONATORS ; FABRICATION ; CHIP ; CRYSTAL
原始文献类型	Article
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/1453
专题	物质科学与技术学院物质科学与技术学院_特聘教授组_程亚组物质科学与技术学院_博士生
通讯作者	Lin, Jintian; Fang, Wei; Cheng, Ya
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China 4.Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China 5.East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China 6.Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 03006, Shanxi, Peoples R China
第一作者单位	物质科学与技术学院
推荐引用方式 GB/T 7714	Fang, Zhiwei,Xu, Yingxin,Wang, Min,et al. Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing[J]. SCIENTIFIC REPORTS,2017,7.
APA	Fang, Zhiwei.,Xu, Yingxin.,Wang, Min.,Qiao, Lingling.,Lin, Jintian.,...&Cheng, Ya.(2017).Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing.SCIENTIFIC REPORTS,7.
MLA	Fang, Zhiwei,et al."Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing".SCIENTIFIC REPORTS 7(2017).