Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing

doi:10.1038/srep45610

	Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
	Fang, Zhiwei1,2,3 ; Xu, Yingxin 4; Wang, Min 1,2; Qiao, Lingling 1; Lin, Jintian 1; Fang, Wei 4; Cheng, Ya1,5,6
	2017-03-30
Source Publication	SCIENTIFIC REPORTS
ISSN	2045-2322
Volume	7
Status	已发表
DOI	10.1038/srep45610
Abstract	We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 x 10(5).
Indexed By	SCI
Language	英语
Funding Project	Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics[IOSKL2015KF34]
WOS Research Area	Science & Technology - Other Topics
WOS Subject	Multidisciplinary Sciences
WOS ID	WOS:000398952300001
Publisher	NATURE PUBLISHING GROUP
WOS Keyword	HIGH-QUALITY-FACTOR ; MICRODISK RESONATORS ; MICRORING RESONATORS ; FABRICATION ; CHIP ; CRYSTAL
Original Document Type	Article
Citation statistics
Document Type	期刊论文
Identifier	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/1453
Collection	物质科学与技术学院物质科学与技术学院_特聘教授组_程亚组物质科学与技术学院_博士生
Corresponding Author	Lin, Jintian; Fang, Wei; Cheng, Ya
Affiliation	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China 4.Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China 5.East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China 6.Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 03006, Shanxi, Peoples R China
First Author Affilication	School of Physical Science and Technology
Recommended Citation GB/T 7714	Fang, Zhiwei,Xu, Yingxin,Wang, Min,et al. Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing[J]. SCIENTIFIC REPORTS,2017,7.
APA	Fang, Zhiwei.,Xu, Yingxin.,Wang, Min.,Qiao, Lingling.,Lin, Jintian.,...&Cheng, Ya.(2017).Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing.SCIENTIFIC REPORTS,7.
MLA	Fang, Zhiwei,et al."Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing".SCIENTIFIC REPORTS 7(2017).

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