| |||||||
ShanghaiTech University Knowledge Management System
| Increasing Ranging Accuracy of Aluminum Nitride Pmuts by Circuit Coupling | |
| 2021-01-25 | |
| 会议录名称 | PROCEEDINGS OF THE IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
 |
| ISSN | 1084-6999 |
| 卷号 | 2021-January |
| 页码 | 740-743 |
| 发表状态 | 已发表 |
| DOI | 10.1109/MEMS51782.2021.9375241 |
| 摘要 | This paper proposes a method to increase the accuracy of distance measurement for piezoelectric micromachined ultrasonic transducers (PMUTs) through introducing stable circuit coupling. The proposed method can characterize the distance through adjustable wavelength. When the ultrasonic flight distance is an odd multiple of the half wavelength, the coupling signal and the piezoelectric response signal are superimposed to produce a sharp ditch. Consequently, such ultrasonic distance measuring technique could be used for the high precision applications. © 2021 IEEE. |
| 会议录编者/会议主办者 | IEEE ; IEEE MEMS Technical Community ; IEEE, IEEE MEMS Tech Community |
| 关键词 | Aluminum nitride Distance measurement Mechanics Piezoelectricity Timing circuits Ultrasonic applications Ultrasonic transducers Coupling signals Distance measuring Half wavelength High precision Micro machined ultrasonic transducer Piezoelectric response Ranging accuracy Aluminum Nitride PMUT rangefinder circuit coupling |
| 会议名称 | 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 |
| 会议地点 | Virtual, Gainesville, FL, United states |
| 会议日期 | January 25, 2021 - January 29, 2021 |
| URL | 查看原文 |
| 收录类别 | EI ; CPCI ; CPCI-S |
| 语种 | 英语 |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics |
| WOS类目 | Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology |
| WOS记录号 | WOS:000667731600183 |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| EI入藏号 | 20211410171651 |
| EI主题词 | MEMS |
| EI分类号 | 701.1 Electricity: Basic Concepts and Phenomena ; 704.2 Electric Equipment ; 713.4 Pulse Circuits ; 753.2 Ultrasonic Devices ; 753.3 Ultrasonic Applications ; 804.1 Organic Compounds ; 931.1 Mechanics ; 943.2 Mechanical Variables Measurements |
| 原始文献类型 | Conference article (CA) |
| 来源库 | IEEE |
| 引用统计 | 正在获取...
|
| 文献类型 | 会议论文 |
| 条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/133514 |
| 专题 | 信息科学与技术学院_硕士生 信息科学与技术学院_PI研究组_吴涛组 信息科学与技术学院_博士生 |
| 作者单位 | 1.School of Information Science and Technology, ShanghaiTech University, China 2.Shanghai Industrial μTechnology Research Institute, China |
| 第一作者单位 | 信息科学与技术学院 |
| 第一作者的第一单位 | 信息科学与技术学院 |
| 推荐引用方式 GB/T 7714 | Junxiang Cai,Kangfu Liu,Liang Lou,et al. Increasing Ranging Accuracy of Aluminum Nitride Pmuts by Circuit Coupling[C]//IEEE, IEEE MEMS Technical Community, IEEE, IEEE MEMS Tech Community:Institute of Electrical and Electronics Engineers Inc.,2021:740-743. |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
修改评论
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。