Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

doi:10.1016/j.optcom.2016.05.025

	Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications
	Wang, Min 1,3; Lin, Jin-Tian 1; Xu, Ying-Xin 2; Fang, Zhi-Wei1,4 ; Qiao, Ling-Ling 1; Liu, Zheng-Ming1,4 ; Fang, Wei 2; Cheng, Ya1
	2017-07-15
发表期刊	OPTICS COMMUNICATIONS (IF:2.2[JCR-2023],2.0[5-Year])
ISSN	0030-4018
卷号	395 页码:249-260
发表状态	已发表
DOI	10.1016/j.optcom.2016.05.025
摘要	Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion. (C) 2016 Elsevier B.V. All rights reserved.
关键词	Femtosecond laser micromachining Multi-photon absorption Dielectric material Whispering gallery mode microresonator Lithium niobate On-chip integration
收录类别	SCI ; EI
语种	英语
资助项目	Open Fund of the State Key Laboratory on Integrated Optoelectronics[IOSKL2015KF34]
WOS研究方向	Optics
WOS类目	Optics
WOS记录号	WOS:000401600500041
出版者	ELSEVIER SCIENCE BV
EI入藏号	20162602540503
EI主题词	Chemical sensors ; Composite micromechanics ; Fabrication ; Micromachining ; Multiphoton processes ; Optical frequency conversion ; Optical waveguides ; Resonators ; Substrates ; Ultrashort pulses ; Whispering gallery modes
WOS关键词	WHISPERING-GALLERY-MODE ; HIGH-QUALITY-FACTOR ; NIOBATE MICRODISK RESONATORS ; LITHIUM-NIOBATE ; OPTICAL MICROCAVITIES ; SINGLE MOLECULES ; RAMAN LASER ; LABEL-FREE ; CHIP ; SILICA
原始文献类型	Article
通讯作者	Fang, Wei ; Cheng, Ya
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/1320
专题	物质科学与技术学院物质科学与技术学院_特聘教授组_程亚组物质科学与技术学院_博士生
通讯作者	Fang, Wei; Cheng, Ya
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 4.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China
推荐引用方式 GB/T 7714	Wang, Min,Lin, Jin-Tian,Xu, Ying-Xin,et al. Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications[J]. OPTICS COMMUNICATIONS,2017,395:249-260.
APA	Wang, Min.,Lin, Jin-Tian.,Xu, Ying-Xin.,Fang, Zhi-Wei.,Qiao, Ling-Ling.,...&Cheng, Ya.(2017).Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications.OPTICS COMMUNICATIONS,395,249-260.
MLA	Wang, Min,et al."Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications".OPTICS COMMUNICATIONS 395(2017):249-260.