A Compact Multi-layer Silicon Platelets Rectangular to Circular Waveguide Transition

doi:10.1109/APMC47863.2020.9331624

	A Compact Multi-layer Silicon Platelets Rectangular to Circular Waveguide Transition
	Sheng Li 1; Jinping Yang 2; Zhongbo Zhu 1; Wentao Wu 3; Shicheng Yang 1; Xiaojun Li 1
	2020
会议录名称	2020 IEEE ASIA-PACIFIC MICROWAVE CONFERENCE (APMC)
页码	914-916
发表状态	已发表
DOI	10.1109/APMC47863.2020.9331624
摘要	This paper proposes a compact waveguide transition structure, which converts rectangular TE10 mode to circular TE11 mode. This waveguide transition is composed of multi-layer silicon platelets fabricated by deep reactive ion etching (DRIE) process. As an example, a waveguide transition worked at 44 GHz is designed. The total length of this waveguide transition is only 1.92 mm. Simulation results show the conversion efficiency of TE10 to TE11 mode is more than 98% in the frequency range from 32 GHz to 49 GHz, corresponding to a return loss better than 14.5 dB. Furthermore, the fractional bandwidth with better than 20 dB return loss is about 14% centered near 44 GHz.
会议录编者/会议主办者	IEEE, IEEE HK Sect AP MTT, IEEE MTT S, IEEE APS, Chinese Univ Hong Kong, Elect Engn Dept, City Univ Hong Kong, State Key Lab Terahertz & Millimeter Waves, City Univ Hong Kong, Dept Elect Engn, EuMA
关键词	millimeter silicon waveguide transition DRIE multi-layer
会议名称	IEEE Asia-Pacific Microwave Conference (APMC)
会议地点	ELECTR NETWORK
会议日期	DEC 08-11, 2020
URL	查看原文
收录类别	EI ; CPCI ; CPCI-S
语种	英语
WOS记录号	WOS:000654830800308
出版者	IEEE
原始文献类型	Proceedings Paper
来源库	IEEE
引用统计	正在获取...
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/127545
专题	物质科学与技术学院
作者单位	1.China Academy of Space Technology,National Key Laboratory of Science and Technology on Space Microwave,Xi’an,China 2.Shanghai Institute of Microsystem and Information Technology, CAS,CAS Center for Excellence in Superconducting Electronics (CENSE),Shanghai,China 3.ShanghaiTech University,School of Physical Science and Technology,Shanghai,China
推荐引用方式 GB/T 7714	Sheng Li,Jinping Yang,Zhongbo Zhu,et al. A Compact Multi-layer Silicon Platelets Rectangular to Circular Waveguide Transition[C]//IEEE, IEEE HK Sect AP MTT, IEEE MTT S, IEEE APS, Chinese Univ Hong Kong, Elect Engn Dept, City Univ Hong Kong, State Key Lab Terahertz & Millimeter Waves, City Univ Hong Kong, Dept Elect Engn, EuMA:IEEE,2020:914-916.