上海科技大学知识管理系统

本发明公开了一种真空压弯式弯晶，其特征在于：包括壳体，所述壳体上设有X射线入射口，从X射线入射口到壳体内部沿X射线入射方向依次设置X射线透射膜、单晶晶片和曲面基底，所述X射线透射膜、壳体的侧壁和底面形成密封腔体，所述密封腔体上设有用于抽真空的排气口，进行晶体压弯时，密封腔体内产生负压，大气压将X射线透射膜柔性地贴合在单晶晶片和曲面基底上。本发明采用真空压弯的方式，各种单晶晶片均可进行压弯，极大地扩展了弯晶的材料选择；利用大气压对单晶晶片和曲面基底柔性地施加应力，受力均匀，结构稳定；可以直接将单晶晶片和曲面基底贴合，复制曲面基底的面形，保持较高的面形精度；同一块单晶晶片可以搭配不同面形的曲面基底，降低制造成本。

The invention discloses a vacuum bending type bent crystal, which is characterized by comprising a shell, wherein an X-ray incident port is formed in the shell, an X-ray transmission film, a single crystal wafer and a curved surface substrate are sequentially arranged from the X-ray incident port to the interior of the shell in the X-ray incident direction, the X-ray transmission film, the side wall of the shell and the bottom surface of the shell form a sealed cavity, the sealed cavity is provided with an exhaust port used for vacuumizing, negative pressure is generated in the sealed cavity when crystal bending is carried out, and the X-ray transmission film is flexibly attached to the single crystal wafer and the curved surface substrate through atmospheric pressure. According to the invention, by adopting a vacuum bending mode, various single crystal wafers can be bent, so that the material selection of crystal bending is greatly expanded; stress is flexibly applied to the single crystal wafer and the curved surface substrate by utilizing atmospheric pressure, the stress is uniform, and the structure is stable; a single crystal wafer can be directly attached to the curved surface substrate, the surface shape of the curved surface substrate is copied, and high surface shape precision is kept; and the same single crystal wafer can be matched with curved-surface substrates withdifferent surface shapes, so that the manufacturing cost is reduced.