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Three-dimensional nanoprinting via charged aerosol jets | |
2021-04-01 | |
发表期刊 | NATURE |
ISSN | 0028-0836 |
EISSN | 1476-4687 |
卷号 | 592期号:7852页码:54-+ |
发表状态 | 已发表 |
DOI | 10.1038/s41586-021-03353-1 |
摘要 | Three-dimensional (3D) printing(1-9) has revolutionized manufacturing processes for electronics(10-12), optics(13-15), energy(16,17), robotics(18), bioengineering(19-21) and sensing(22). Downscaling 3D printing(23) will enable applications that take advantage of the properties of micro- and nanostructures(24,25). However, existing techniques for 3D nanoprinting of metals require a polymer-metal mixture, metallic salts or rheological inks, limiting the choice of material and the purity of the resulting structures. Aerosol lithography has previously been used to assemble arrays of high-purity 3D metal nanostructures on a prepatterned substrate(26,27), but in limited geometries(26-30). Here we introduce a technique for direct 3D printing of arrays of metal nanostructures with flexible geometry and feature sizes down to hundreds of nanometres, using various materials. The printing process occurs in a dry atmosphere, without the need for polymers or inks. Instead, ions and charged aerosol particles are directed onto a dielectric mask containing an array of holes that floats over a biased silicon substrate. The ions accumulate around each hole, generating electrostatic lenses that focus the charged aerosol particles into nanoscale jets. These jets are guided by converged electric-field lines that form under the hole-containing mask, which acts similarly to the nozzle of a conventional 3D printer, enabling 3D printing of aerosol particles onto the silicon substrate. By moving the substrate during printing, we successfully print various 3D structures, including helices, overhanging nanopillars, rings and letters. In addition, to demonstrate the potential applications of our technique, we printed an array of vertical split-ring resonator structures. In combination with other 3D-printing methods, we expect our 3D-nanoprinting technique to enable substantial advances in nanofabrication. |
关键词 | 3D nanoprinting |
学科领域 | 应用物理学 ; 金属材料 ; 金属材料其他学科 ; 冶金工程技术其他学科 ; 流体传动与控制 ; 机械工程其他学科 |
学科门类 | 工学::材料科学与工程(可授工学、理学学位) ; 工学::冶金工程 |
URL | 查看原文 |
收录类别 | SCIE |
语种 | 英语 |
WOS研究方向 | Science & Technology - Other Topics |
WOS类目 | Multidisciplinary Sciences |
WOS记录号 | WOS:000635764400019 |
出版者 | NATURE RESEARCH |
原始文献类型 | Article |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/126150 |
专题 | 物质科学与技术学院_PI研究组_冯继成组 |
共同第一作者 | Jung, Yoon-Ho |
通讯作者 | Rho, Junsuk; Choi, Mansoo |
作者单位 | 1.Seoul Natl Univ, Global Frontier Ctr Multiscale Energy Syst, Seoul, South Korea; 2.Seoul Natl Univ, Dept Mech Engn, Seoul, South Korea; 3.Pohang Univ Sci & Technol POSTECH, Dept Mech Engn, Pohang, South Korea; 4.RIKEN Ctr Adv Photon, Innovat Photon Manipulat Res Team, Wako, Saitama, Japan; 5.Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan; 6.RIKEN Cluster Pioneering Res, Metamat Lab, Wako, Saitama, Japan; 7.Tokushima Univ, Inst PostLED Photon, Tokushima, Japan; 8.Pohang Univ Sci & Technol POSTECH, Dept Chem Engn, Pohang, South Korea; 9.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai, Peoples R China; 10.Samsung Elect, Mechatron R&D Ctr, Hwaseong, South Korea |
推荐引用方式 GB/T 7714 | Jung, Wooik,Jung, Yoon-Ho,Pikhitsa, Peter V.,et al. Three-dimensional nanoprinting via charged aerosol jets[J]. NATURE,2021,592(7852):54-+. |
APA | Jung, Wooik.,Jung, Yoon-Ho.,Pikhitsa, Peter V..,Feng, Jicheng.,Yang, Younghwan.,...&Choi, Mansoo.(2021).Three-dimensional nanoprinting via charged aerosol jets.NATURE,592(7852),54-+. |
MLA | Jung, Wooik,et al."Three-dimensional nanoprinting via charged aerosol jets".NATURE 592.7852(2021):54-+. |
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